Abstract: A microfabricated, remotely actuated fluid pump includes a LIGA-fabricated movable member disposed within a cavity. The LIGA-fabricated movable member and the cavity cooperate to (a) define a sufficiently small clearance therebetween to achieve effective pumping action while (b) presenting a sufficiently low-friction fit to enable remote actuation. Such a pump can take the form of a piston pump, a vane pump, a centrifugal pump, a gear pump, etc. Other fluidic devices including flow sensors, piston valves, hydraulic motors, nozzles, and connectors can be fabricated using similar principles.
Type:
Grant
Filed:
November 3, 1994
Date of Patent:
August 4, 1998
Assignee:
Memstek Products, LLC
Inventors:
Andrews S. Dewa, Christophe J. P. Sevrain