Abstract: The invention relates to a layer arrangement (1) for the formation of a coating on a surface (2) of a substrate (3), in a particular on the surface (2) of a tool (3), wherein the layer arrangement comprises at least one hard layer (4,5,6,7,8) having the composition SiaBbMecNuCvOw with a,b>0 and 33 at%>c?0, preferably 25 at%>c?0, in particular 10 at%>c?0 and u,v,w?0, and Me being a metal. Futhermore, the invention relates to a coating method for depositing a layer arrangement (1), as well as to a substrate (3), in particular a tool (3) or a wearing part (3) having a layer arrangement (1) according to the invention.

Abstract: The invention relates to a coating apparatus (1) with a process chamber (2) for the coating of substrate (S) by means of cathode sputtering, said process chamber (2) having an inlet (3) and an outlet (4) for a process gas, for setting up and maintaining a gas atmosphere, as well as an anode (5) and a cathode (6) with a target (61) of the target material (62) to be sputtered and an electrical energy source (7) for the generation of an electrical voltage between the anode (5) and the cathode (6), wherein the electrical energy source (7) includes an electrical sputtering source (8) with which the target material (62) of the cathode (6) can be transferred by sputtering into a vapour form.

Abstract: The invention relates to hard coating coated parts which are coated with a hard coating containing the elements Al, Ti, Cr, N, O with a chemical composition of each element of AlaTibCrcNwO100−w in the range of 30≦a≦70, 30≦b≦70, 0.5≦c≦20 a+b+c=100 at % and 70≦w≦99%. The invention aims at a superior adhesion between the coating and the substrate without a reduction of the wear resistance, of the oxidation resistance and of the friction properties, but improving every one of the coating properties to a achieve a stable behavior under heavy-duty cutting, resulting in a long lifetime. Therefore, it is proposed that the full width at half maximum (FWHM) 2&thgr; of the (200)x-ray diffraction peak is larger than 0.4° and smaller than 0.7°.

Abstract: In hard layer coated parts which are coated with hard layers, this invention aims at improvements of wear resistance, oxidation behavior and lubrication properties. In hard layer coated parts which are coated with hard layers, hard layer coated parts featured by hard layers coated with minimum 1-2 layers which contain Al, Ti, Cr, N, O.