Abstract: An optical metrology system for measuring a contour of a workpiece surface. The system includes a multi-wavelength light projector that projects a wavelength-varying collimated light beam onto the surface of the workpiece. The collimated light beam has a plurality of substantially parallel light rays, each of which has a predetermined wavelength. The wavelength of the plurality of light rays varies in a predetermined manner across a width of the collimated light beam. A wavelength-discriminating detector determines an intensity of light reflected from the workpiece surface and detects wavelength-specific characteristics of the received reflected light. Significantly, the wavelength-specific characteristics of the reflected light are related to the distance of the workpiece surface from the detector. Specifically, the multi-wavelength projector includes a collimated light source that generates a collimated light beam.

Abstract: An optical metrology system and method for rapidly and accurately measuring an object surface contour. The optical metrology system measures cross-sections of an object substantially orthogonal to an axis of the object includes a first and second optical assemblies each arranged proximate to opposing sides of a desired section of the object to be measured. The optical assemblies each include at least one source of electromagnetic radiation such as a laser, each configured to project a linear beam on a proximate object surface. The optical assemblies also include a line scan camera fixed relative to the lasers and having a single column of detector elements substantially parallel with the object surface. The camera receives reflections from the object surface which are provided to a controller for processing. The system also includes a first adjustment device for adjusting a distance between the lasers of each assembly and the object.