Abstract: A dual pump for independently pumping two fluids includes a pump body having a first concave depression on a first side of the body. A first inlet port and a first outlet port are contained within the body, in fluid communication with the first depression. A second concave depression is on a second side of the body opposite the first depression. A second inlet port and a second outlet port are contained within the body in fluid communication with the second depression. A first diaphragm is coupled to the first side of the body and encloses the first depression to form a first inner chamber. A second diaphragm is coupled to the second side of the body and encloses the second depression to form a second inner chamber. A shell encloses the body on its first and second sides. The shell defines a first outer chamber with the first diaphragm in pressure communication with the first inner chamber.

Abstract: An HMDS tank for use in an integrated circuit fabrication process includes a tank configured to hold HMDS having an first inlet port configured to receive a carrier gas below an HMDS surface level, an outlet port configured to release said carrier gas saturated with HMDS above the HMDS surface level, and a second inlet port configured to receive HMDS. A sensor is positioned in the tank at a predetermined HMDS level and configured to generate a sensor signal when the HMDS surface level falls below the predetermined HMDS level. A processor is coupled to the sensor and configured to generate a fill signal in response to the sensor signal to initiate introduction of HMDS into the tank through the second inlet port. In another embodiment, the HMDS tank further includes a second sensor positioned in the tank at a low HMDS level. The processor is also coupled to the second sensor and configured to generate an alarm signal in response to the second sensor signal to warn an operator of a low HMDS level in the tank.

Abstract: A system for dispensing liquid from first and second containers is disclosed herein. The liquid dispensing system includes a first media transfer line, positioned in liquid-flow communication with the first container, for transferring liquid from the first container. A second media transfer line, positioned in liquid-flow communication with the second container, is disposed to transfer liquid from the second container. When placed in a first state a switchable valve prevents liquid from flowing through the first media transfer line and allows liquid to flow through the second media transfer line. In a second state the switchable valve prevents liquid from flowing through the second media transfer line while allowing liquid to flow through the first media transfer line. A liquid storage reservoir connected in liquid-flow communication with the switchable valve stores liquid received from the first and second media transfer lines by way of the switchable valve.