Abstract: A device is obtained for converting the intensity distribution of a laser beam in particular into an intensity distribution which falls constantly along an axis from one side to the other in that a homogenizer (10), which mutually superimposes the sub-beams of the laser beam such that when a laser beam with a specific intensity distribution passes through the homogenizer, a homogenization of the intensity distribution of the laser beam is promoted, is combined with at least one inverter (24, 26) which inverts the intensity distribution of a sub-region, in particular a sub-beam or a plurality of adjacent sub-beams, along at least one axis along which the intensity is to be converted. The extent of the fall in intensity from one side to the other can be controlled by means of the number of the inverters.

Abstract: An apparatus and a method for controlling the intensity distribution of a laser beam for processing a substrate provide that the laser radiation passes a homogenizing device, subsequent to which partial beams of the laser beam superimpose one another so that a homogenization of the intensity distribution of the laser beam is achieved. By arrangement of a diaphragm at a position in the radiation path of the laser beam, radiation is cut out off the partial beams superimposing one another in such a way that varied portions of at least some of the partial beams are cut out.

Abstract: This invention concerns a process useful for increasing the accuracy of the shape of a laser ablated feature formed on a substrate, especially where the substrate is a polymeric article. The process includes irradiating the polymeric article with laser light that has passed through a retardation plate selected from stationary adjustable plates, rotating plates or spinning plates, preferable in multiples of quarter-waves or half-waves. This invention also concerns a laser apparatus useful for making ablated features in a substrate having a radiation source; a mask positioned between the radiation source and a substrate to be irradiated, and a retardation plate which is stationary and adjustable, rotating or spinning plates.

Abstract: An optical device is described for generating a sharp illuminating line on an illuminating plane from a high-power laser beam. The sharp illuminating line includes long and short axes. The optical device comprises an anamorphic setup of imaging and homogenizing optical systems for the separate imaging and homogenizing of the laser beam in the directions of the long and short axes. For imaging and homogenizing the laser beam in the direction of the short axes, a slit is illuminated homogeneously and the slit is imaged on the illumination plane by reducing optics.

Abstract: An optical device for homogenizing a light beam comprises a plurality of first lenses on which the light beam impinges from one side. At the side on which the light beam impinges the first lenses are convex, while they are prismatic at the opposite side at which the light beam emerges from the lenses. At least one convergent lens is disposed downstream of the lenses mentioned in the direction of the light beam. Instead of giving the first lenses a prismatic configuration it is also possible to make the first lenses plano-convex and arrange second lenses of plano-concave shape downstream of the first lenses in the direction of the light beam.