Patents Assigned to Micron Tecnology, Inc.
  • Publication number: 20190139893
    Abstract: A method of forming an elevationally-extending conductor laterally between a pair of structures comprises forming a pair of structures individually comprising an elevationally-extending-conductive via and a conductive line electrically coupled to and crossing above the conductive via. The conductive line and the conductive via respectively have opposing sides in a vertical cross-section. Elevationally-extending-insulative material is formed along the opposing sides of the conductive via and the conductive line in the vertical cross-section. The forming of the insulative material comprises forming a laterally-inner-insulator material comprising silicon, oxygen, and carbon laterally-outward of the opposing sides of the conductive via and the conductive line in the vertical cross-section. A laterally-intervening-insulator material comprising silicon and oxygen is formed laterally-outward of opposing sides of the laterally-inner-insulator material in the vertical cross-section.
    Type: Application
    Filed: November 7, 2018
    Publication date: May 9, 2019
    Applicant: Micron Tecnology, Inc.
    Inventor: Silvia Borsari
  • Publication number: 20140363947
    Abstract: A phase change memory cell and methods of fabricating the same are presented. The memory cell includes a variable resistance region and a top and bottom electrode. The shapes of the variable resistance region and the top electrode are configured to evenly distribute a current with a generally hemispherical current density distribution around the first electrode.
    Type: Application
    Filed: August 19, 2014
    Publication date: December 11, 2014
    Applicant: MICRON TECNOLOGY, INC.
    Inventors: Jun Liu, Michael P. Violette
  • Patent number: 7332413
    Abstract: Methods of forming semiconductor devices include thinning a region of a semiconductor wafer and forming at least one semiconductor die laterally within a thinned region of the wafer. One or more reinforcement structures may be defined on the wafer. Semiconductor wafers include one or more reinforcement structures that extend laterally along the wafer and project from at least one surface of the wafer. The wafers further include a plurality of at least partially formed semiconductor dice laterally within at least one region having a thickness that is less than a thickness of the reinforcement structures. The wafers may include a plurality of at least partially formed semiconductor dice laterally within each of a plurality of thin regions defined between a plurality of reinforcement structures. The thin regions may have an average thickness less than an average thickness of the reinforcement structures.
    Type: Grant
    Filed: September 5, 2006
    Date of Patent: February 19, 2008
    Assignee: Micron Tecnology, Inc.
    Inventor: Kyle K. Kirby
  • Patent number: 6476434
    Abstract: A memory cell structure for a folded bit line memory array of a dynamic random access memory device includes buried bit and word lines, with the access transistors being formed as a vertical structure on the bit lines. Isolation trenches extend orthogonally to the bit lines between the access transistors of adjacent memory cells, and a pair of word lines are located in each of the isolation trenches. The word lines are oriented vertically widthwise in the trench and are adapted to gate alternate access transistors, so that both an active and a passing word line can be contained within each memory cell to provide a folded bit line architecture. The memory cell has a surface area that is approximately 4 F2, where F is a minimum feature size. Also disclosed are processes for fabricating the DRAM cell using bulk silicon or a silicon on insulator processing techniques.
    Type: Grant
    Filed: May 16, 2000
    Date of Patent: November 5, 2002
    Assignee: Micron Tecnology, Inc.
    Inventors: Wendell P. Noble, Leonard Forbes, Kie Y. Ahn
  • Patent number: 6226394
    Abstract: An inventive method tracks IC devices through the assembly steps in a manufacturing process. Prior to die attach, a laser scribe marks the lead frame of each of the devices with a coded hole matrix that gives each device a unique ID code. During die attach, an optical hole reader retrieves the ID code of each of the IC devices, and a computer system stores the retrieved ID codes in association with the lot numbers of the ICs attached to the lead frames. The ID codes of the devices are then read at each step in assembly so the devices can be tracked through assembly individually, rather than by lots. As a result, the devices can proceed through assembly in a more efficient, continuous manner (i.e., without breaks between lots).
    Type: Grant
    Filed: November 16, 1999
    Date of Patent: May 1, 2001
    Assignee: Micron Tecnology, Inc.
    Inventors: Kevin Wilson, Ron Hjorth
  • Patent number: 5874351
    Abstract: A method of controlling stresses in thin films that are deposited over semiconductor device substrates. During anneal process steps, grain growth of the film creates stresses in that can damage or destroy it. The stresses lead to warping and bowing and ultimately to film cracking which undermines desired low resistivity. The present invention imparts thermal stability to thin films by grain boundary stuffing (GBS) of preselected elements that resist film grain changes that cause the stresses. GBS implants the elements into the thin film at desired depths, but above the film-substrate interface, sufficient to prevent or lessen destructive grain growth. GBS provides for structural film stability required during severe thermal cycles that occur during subsequent processing of semiconductor devices.
    Type: Grant
    Filed: June 13, 1996
    Date of Patent: February 23, 1999
    Assignee: Micron Tecnology, Inc.
    Inventors: Yong-Jun Hu, Pai Hung Pan