Abstract: A semiconductor cassette reducer has a first substantially U-shaped plate and a second substantially U-shaped plate. A number of wafer supports connect the first substantially U-shaped plate to the second substantially U-shaped plate. Several retention springs are attached to the first substantially U-shaped plate. The retention springs hold the semiconductor cassette reducer in a FOUP (front opening unified pod).
Type:
Application
Filed:
December 28, 2001
Publication date:
July 3, 2003
Applicant:
Microtool, Inc.
Inventors:
Gordon Haggott Beckhart, Patrick Rooney Conarro, Kamran Michael Farivar-Sadri
Abstract: An alignment wafer for a semiconductor processing tool has a disk having a radius of a standard semiconductor wafer. The disk is formed of a flexible, substantially non-deformable material. A concentric transparent disk is inside of the disk.
Type:
Grant
Filed:
December 28, 2001
Date of Patent:
May 27, 2003
Assignee:
Microtool, Inc.
Inventors:
Gordon Haggott Beckhart, Patrick Rooney Conarro, Kamran Michael Farivar-Sadri
Abstract: A robot alignment system (10) includes a sensor system (12). The sensor system (12) is designed to attach to an end effector of a robot arm (14). A rough alignment target (16) is attached to a work station. A fine alignment target (22) is placed on a work surface of the work station. The sensor system (12) first determines the rough alignment target (16). The robot arm (14) is then moved to detect the fine alignment target (22).
Type:
Grant
Filed:
April 18, 2001
Date of Patent:
March 11, 2003
Assignee:
MicroTool, Inc
Inventors:
Gordon Haggott Beckhart, Patrick Rooney Conarro, Kevin James Harrell, Michael Charles Krause, Kamran Michael Farivar-Sadri
Abstract: An electronic level (10) has a rigid flat disk (12). An electronic level sensor (14) is attached to the rigid flat disk (12). An electronic display (20) is electrically connected to the electronic level sensor (14).
Type:
Grant
Filed:
March 8, 2000
Date of Patent:
March 4, 2003
Assignee:
Microtool, Inc.
Inventors:
Gordon Haggott Beckhart, Patrick Rooney Conarro, Kevin James Harrell, Michael Charles Krause, Kamran Michael Farivar-Sadri
Abstract: A semiconductor alignment tool has a housing that has a number of registration pins for mating with a standard semiconductor cassette. A plurality of x-y axis sensors are embedded in a first surface of the housing.
Type:
Grant
Filed:
October 1, 1999
Date of Patent:
October 23, 2001
Assignee:
MicroTool, Inc.
Inventors:
Gordon Haggott Beckhart, Patrick Rooney Conarro, Kevin James Harrell, Michael Charles Krause, Kamran Michael Farivar-Sadri
Abstract: A tool for aligning a robot arm to a cassette for holding semiconductor wafers has a housing having a slot one position for holding a semiconductor wafer. A z-axis non-intrusive detector is attached to the housing and senses if the semiconductor wafer is aligned in the slot one position. An indicator is connected to the z-axis detector and provides a signal indicating when the semiconductor wafer is aligned in the slot one position.
Type:
Grant
Filed:
July 2, 1999
Date of Patent:
October 9, 2001
Assignee:
MicroTool, Inc.
Inventors:
Gordon Haggott Beckhart, Patrick Rooney Conarro, Kevin James Harrell, Michael Charles Krause, Kamran Michael Farivar-Sadri
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