Abstract: Method of making a corrosion resistant gas cell including an end cap having integral reflecting mirrors and sealing surfaces, the method involving the steps of: rough shaping a plate of stainless steel to near net dimensions using a standard-precision CNC milling machine and standard cutting bits to form a near net stainless steel core; coating the near net stainless steel core with a layer of nickel that is at least 0.

Abstract: An interferometer structure is disclosed in which alignment problems are reduced by providing a special retaining structure for the transparent beamsplitter plates. In order to minimize distortion of the beamsplitter plates, the metal housing surfaces, against which they are held, are each coated with a material which has a very slippery and extremely flat surface engaging the surface of the respective beamsplitter plate. The preferred coating material is polytetrafluoroethylene. A glass tool (optically flat) is used during heating (and hardening) of the coating material, for the purpose of insuring an unusually flat coating surface.

Abstract: A spectrometer construction is shown in which the chassis of the spectrometer is fabricated by stamping, punching, and bending sheet metal. The mirror supports and other elements are also formed from sheet metal. Precision locations are assured by tab and slot, or half-shear and recess, matching of the sheet metal parts. The mirrors in the spectrometer (other than those in the interferometer) are secured directly to vertical sheet-metal walls without intervening adjustments. The mirrors have unitary reflection and backing structures formed either by a diamond-cutting lathe, or by precision plastic molding. The same mirror locating means are used both during formation of each curved mirror surface and also in assembling of the mirror body in the spectrometer.

Abstract: A small ruggedized interferometer is disclosed, which can operate efficiently in spite of being subject to ambient mechanical vibrations. A prior art structure was analyzed to diagnose its performance deficiencies. The successful method is a step by step structural solution, beginning with the lowest frequency mechanical vibration resonance in the interferometer, restructuring to raise that frequency, then proceeding to the next lowest mechanical vibration resonance frequency in the interferometer, and so on. The movable mirror is carried by a parallelogram linkage. The minimum resonance in the present interferometer has been raised to approximately 1000 Hertz. A first (lowest) frequency resonance problem solved was due to the motor and its interface with the movable mirror. A second resonance problem solved was due to the vibration of the movable mirror itself.

Abstract: There is disclosed an adjustment structure for use in initially aligning the two arms of an interferometer, by varying slightly the angular position of mirror surfaces. Two "wedge" elements are used behind the mirror, each of which is independently rotatable about an axis perpendicular to the face of the mirror. In order to provide ideal lubrication between the relatively movable flat engaging surfaces, a solid layer of a low friction polymer is used, preferably polytetrafluoroethylene.

Abstract: An optical system is disclosed which significantly enhances the throughput of a grating spectrometer intended to determine impurity concentrations on the surface of semiconductor materials (usually single crystal silicon) used for integrated circuits. The system, which uses a laser beam as the photo-excitation means impinging on a Dewar-contained sample, includes a pre-sample series of lenses which so shapes the laser beam that its shape at the point of impingement on the sample is proportionally similar to the shape of the monochromator slit in the spectrometer. The same lens which provides final focusing of the laser beam on the sample also collects the sample-emitted radiation, which is thereafter focused by suitable optics on the monochromator slit, where it preferably substantially matches the shape of the slit, but slightly overfills the slit.

Abstract: An apparatus, for photo-luminescent analysis of the surface of crystalline silicon, is disclosed, in which the photons emitted from the sample are passed through a two-beam (or two-arm) interferometer, having the usual beamsplitter, fixed mirror, and movable mirror. The interferometer output is directed to a detector which is a germanium photo-diode, cooled in a Dewar, which also cools the initial electronic circuitry to which the detector output is input. Using the disclosed apparatus, methods are available for readily eliminating the negative effect of the electron-hole-droplet phenomenon, and for utilizing the no-photon region of the spectrum to identify otherwise unidentified impurity (or dopant) materials.