Patents Assigned to MilliSensor Systems and Actuators, Inc.
  • Electrically decoupled silicon gyroscope
    Patent number: 6626039
    Abstract: An oscillatory gyroscope is described with decoupled drive and sense oscillators and reduced cross-axis sensitivity. The gyroscope is fabricated using a plasma micromachining process on standard silicon wafers. The electrical isolation of the drive and sense functions of the gyroscope, contained within the same micromechanical element, reduce cross-coupling while obtaining high inertial mass and high sensitivity.
    Type: Grant
    Filed: September 13, 2000
    Date of Patent: September 30, 2003
    Assignee: MilliSensor Systems and Actuators, Inc.
    Inventors: Scott G. Adams, James Groves, Donato Cardarelli, Raymond Carroll, Charles R. Dauwalter