Abstract: There is provided a MOMS sensor comprising a fiber interface comprising a fiber passthrough for one or more optical fibers, a cavity comprising an element hermetically encapsulated within the cavity, wherein the element is movably anchored by SiN arms, which are movable with respect to walls of the cavity, wherein the SiN arms comprise anchor portions at first ends of the SiN arms, which are connected to the element, and at second ends of the SiN arms, which are connected to the walls of the cavity, and the fiber interface is configured to receive the fibers through the fiber passthrough into positions for communications of light between the element and the fibers. In this way a robust structure that supports sensitivity of the sensor is provided.
Type:
Grant
Filed:
February 12, 2021
Date of Patent:
February 13, 2024
Assignee:
MIRAEX SA
Inventors:
Mitchell Anderson, Clément Javerzac-Galy, Olexiy Feofanov, Nicolas Abelé
Abstract: There is provided a MOMS sensor comprising a fiber interface comprising a fiber passthrough for one or more optical fibers, a cavity comprising an element hermetically encapsulated within the cavity, wherein the element is movably anchored by SiN arms, which are movable with respect to walls of the cavity, wherein the SiN arms comprise anchor portions at first ends of the SiN arms, which are connected to the element, and at second ends of the SiN arms, which are connected to the walls of the cavity, and the fiber interface is configured to receive the fibers through the fiber passthrough into positions for communications of light between the element and the fibers. In this way a robust structure that supports sensitivity of the sensor is provided.
Type:
Application
Filed:
February 12, 2021
Publication date:
August 19, 2021
Applicant:
MIRAEX SA
Inventors:
Mitchell ANDERSON, Clément JAVERZAC-GALY, Olexiy FEOFANOV, Nicolas ABELÉ