Abstract: Metal-insulator-metal planar electron emitters (PEES) have potential for use in advanced lithography for future generations of semiconductor devices. The PEE has, however, a limited lifetime, which restricts its commercial applicability. It is believed that the limited lifetime of the PEE is limited by in-diffusion of metal ions from the anode. The in-diffusion may be countered in a number of different ways. One way is to cool the PEE to temperatures below room temperature. This lowers the metal ion mobility, and so the metal ions are less likely to diffuse into the insulator layer. Another way is to occasionally reverse the electrical potential across the PEE from the polarity used to generate the electron beam. This counteracts the electrical driving force that drives the positively charged metal ions from the PEE anode to the PEE cathode.
Type:
Grant
Filed:
June 20, 2003
Date of Patent:
May 10, 2005
Assignee:
Nanion ApS
Inventors:
Petr Viscor, Michael Jensen, Rolf Stribolt Andersen, Vladimir Kolarik, Armin Delong
Abstract: Metal-insulator-metal planar electron emitters (PEEs) have potential for use in advanced lithography for future generations of semiconductor devices. The PEE has, however, a limited lifetime, which restricts its commercial applicability. It is believed that the limited lifetime of the PEE is limited by in-diffusion of metal ions from the anode. The in-diffusion may be countered in a number of different ways. One way is to cool the PEE to temperatures below room temperature. This lowers the metal ion mobility, and so the metal ions are less likely to diffuse into the insulator layer. Another way is to occasionally reverse the electrical potential across the PEE from the polarity used to generate the electron beam. This counteracts the electrical driving force that drives the positively charged metal ions from the PEE anode to the PEE cathode.
Type:
Application
Filed:
June 20, 2003
Publication date:
December 23, 2004
Applicant:
Nanion ApS
Inventors:
Petr Viscor, Michael Jensen, Rolf Stribolt Andersen, Vladimir Kolarik, Armin Delong