Patents Assigned to Nanofilm Technologies International Limited
  • Patent number: 11926890
    Abstract: A cathode arc source comprises: a cathode target; a first magnetic field source located above the target; a second magnetic field source located below the target; and a third magnetic field source located between the first and second magnetic field sources and having an opposite polarity to the first magnetic field source; wherein the resultant magnetic field from the first, second and third magnetic field sources has zero field strength in a direction substantially normal to the target at a position above the target. The invention also provides methods of striking a cathode target and methods of depositing coatings which can be carried out using the cathode arc source described herein.
    Type: Grant
    Filed: March 13, 2020
    Date of Patent: March 12, 2024
    Assignee: NANOFILM TECHNOLOGIES INTERNATIONAL LIMITED
    Inventors: Xu Shi, Ming Chu Yang, Kok How Tan
  • Patent number: 11898257
    Abstract: An electrode for electrochemical applications is coated with a layer of a-C, wherein the layer of a-C comprises at least 10 each of first and second sub-layers, being—(i) first sub-layers having high conductivity with a sp2 content of 60-95%, alternating with—(ii) second sub-layers having high corrosion resistance with a sp2 content of 50-90%, wherein the sp2 content of the first sub-layers is at least 3% greater than the sp2 content of the second sub-layers. A method of making such electrodes comprises: —a) depositing a first sub-layer comprising a-C, —b) depositing a second sub-layer comprising a-C wherein the sp2 content of the first sub-layer is at least 3% greater than the sp2 content of the second sub-layer, and—c) repeating the steps above to deposit at least 10 first sub-layers alternating with 10 second sub-layers, so as to produce the electrodes.
    Type: Grant
    Filed: January 20, 2023
    Date of Patent: February 13, 2024
    Assignee: Nanofilm Technologies International Limited
    Inventors: Zhi Tang, Ting Wang, Xu Shi
  • Patent number: 11903116
    Abstract: A filter (104a, 104b, 108) for a cathode arc source comprises: a filter duct having at least one bend (104a, 104b), and a first magnetic field source for steering plasma through the filter duct for removal of macroparticles from the plasma; wherein the apparatus comprises a second magnetic field source (108) which is rotatably mounted surrounding a portion of the filter duct. Cathode arc sources (102) and cathode arc deposition apparatuses (106) comprise the filters described herein, and methods of filtering macroparticles from a beam of plasma emitted from a cathode arc source use the filters.
    Type: Grant
    Filed: June 18, 2021
    Date of Patent: February 13, 2024
    Assignee: Nanofilm Technologies International Limited
    Inventors: Xu Shi, Ming Chu Yang, Kok How Tan
  • Patent number: 11855308
    Abstract: A bipolar plate for a PEM hydrogen fuel cell is coated with a carbon-containing coating, the carbon-containing coating comprising in order: a) a titanium seed layer; b) a titanium nitride interfacial layer; and c) a a-C top layer, and wherein the bipolar plate is formed from stainless steel. Methods for making such coated plates are described. The a-C has a density of greater than 2.0 g/cm3, a molar hydrogen content of 5% or less, an sp2 carbon content of 40% to 80% and an sp3 carbon content of 20% to 60%. The coated plates possess good electrical conductivity and are resistant to corrosion.
    Type: Grant
    Filed: July 14, 2021
    Date of Patent: December 26, 2023
    Assignee: Nanofilm Technologies International Limited
    Inventors: Xu Shi, Zhi Tang
  • Patent number: 11643733
    Abstract: A substrate is coated with a multi-layer coating, comprising in order: (i) a first functional layer comprising ta-C, (ii) a second functional layer comprising ta-C, (iii) (a) a third functional layer comprising ta-C and a first intermediate layer comprising a carbide of a first element, or (b) a first intermediate layer comprising a carbide of a first element, and a second intermediate layer comprising the first element, wherein the ta-C has a hydrogen content less than 10% and an sp2 content less than 30%; wherein (i) the Young's modulus or (ii) the hardness or (iii) both the Young's modulus and the hardness independently stay the same or increase from layer to layer in (iii) (a) from the first intermediate layer to the first functional layer, or in (iii) (b) from the second intermediate layer to the first functional layer.
    Type: Grant
    Filed: November 7, 2019
    Date of Patent: May 9, 2023
    Assignee: NANOFILM TECHNOLOGIES INTERNATIONAL LIMITED
    Inventors: Xu Shi, Zhi Tang
  • Publication number: 20230137731
    Abstract: A bipolar plate for a PEM hydrogen fuel cell is coated with a carbon-containing coating, the carbon-containing coating comprising in order: a) a titanium seed layer; b) a titanium nitride interfacial layer; and c) a a-C top layer, and wherein the bipolar plate is formed from stainless steel. Methods for making such coated plates are described. The a-C has a density of greater than 2.0 g/cm3, a molar hydrogen content of 5% or less, an sp2 carbon content of 40% to 80% and an sp3 carbon content of 20% to 60%. The coated plates possess good electrical conductivity and are resistant to corrosion.
    Type: Application
    Filed: July 14, 2021
    Publication date: May 4, 2023
    Applicant: Nanofilm Technologies International Limited
    Inventors: Xu SHI, Zhi TANG
  • Publication number: 20230137012
    Abstract: A filter (104a, 104b, 108) for a cathode arc source comprises: a filter duct having at least one bend (104a, 104b), and a first magnetic field source for steering plasma through the filter duct for removal of macroparticles from the plasma; wherein the apparatus comprises a second magnetic field source (108) which is rotatably mounted surrounding a portion of the filter duct. Cathode arc sources (102) and cathode arc deposition apparatuses (106) comprise the filters described herein, and methods of filtering macroparticles from a beam of plasma emitted from a cathode arc source use the filters.
    Type: Application
    Filed: June 18, 2021
    Publication date: May 4, 2023
    Applicant: Nanofilm Technologies International Limited
    Inventors: Xu SHI, Ming Chu YANG, Kok How TAN
  • Publication number: 20220162739
    Abstract: A method of depositing a coating on a substrate comprises simultaneously depositing a first material via a CVA process and a second material via a sputtering process; also described are coatings obtained therefrom and coated substrates.
    Type: Application
    Filed: March 13, 2020
    Publication date: May 26, 2022
    Applicant: Nanofilm Technologies International Limited
    Inventors: Xu SHI, Zhi TANG, Zhang Yang RONG
  • Publication number: 20220145444
    Abstract: A cathode arc source comprises: a cathode target; a first magnetic field source located above the target; a second magnetic field source located below the target; and a third magnetic field source located between the first and second magnetic field sources and having an opposite polarity to the first magnetic field source; wherein the resultant magnetic field from the first, second and third magnetic field sources has zero field strength in a direction substantially normal to the target at a position above the target. The invention also provides methods of striking a cathode target and methods of depositing coatings which can be carried out using the cathode arc source described herein.
    Type: Application
    Filed: March 13, 2020
    Publication date: May 12, 2022
    Applicant: Nanofilm Technologies International Limited
    Inventors: Xu SHI, Ming Chu YANG, Kok How TAN
  • Publication number: 20220042178
    Abstract: The invention provides substrates with a multi-layer coating, comprising in order: i) the substrate; ii) a seed layer; ill) a barrier layer deposited via a CVD method; and iv) a functional layer deposited via a PVD method, and methods of making such coatings. The coatings of the invention have been shown to possess good resistance to corrosion.
    Type: Application
    Filed: December 17, 2019
    Publication date: February 10, 2022
    Applicant: Nanofilm Technologies International Limited
    Inventors: Xu SHI, Zhi TANG
  • Publication number: 20220033975
    Abstract: A substrate is coated with a multi-layer coating, comprising in order: (i) a first functional layer comprising ta-C, (ii) a second functional layer comprising ta-C, (iii) (a) a third functional layer comprising ta-C and a first intermediate layer comprising a carbide of a first element, or (b) a first intermediate layer comprising a carbide of a first element, and a second intermediate layer comprising the first element, wherein the ta-C has a hydrogen content less than 10% and an sp2 content less than 30%; wherein (i) the Young's modulus or (ii) the hardness or (iii) both the Young's modulus and the hardness independently stay the same or increase from layer to layer in (iii) (a) from the first intermediate layer to the first functional layer, or in (iii) (b) from the second intermediate layer to the first functional layer.
    Type: Application
    Filed: November 7, 2019
    Publication date: February 3, 2022
    Applicant: Nanofilm Technologies International Limited
    Inventors: Xu SHI, Zhi TANG
  • Publication number: 20220002861
    Abstract: The invention provides a substrate coated with a multi-layer coating, comprising in order: (a) the substrate; (b) a thermally insulating layer (e.g. Si3N4); (c) an interfacial layer (e.g. SiC); and (d) one or more layers comprising ta-C; wherein the interfacial layer promotes adhesion of the one or more layers comprising ta-C to the thermally insulating layer; and methods for producing such coatings.
    Type: Application
    Filed: November 7, 2019
    Publication date: January 6, 2022
    Applicant: Nanofilm Technologies International Limited
    Inventor: Xu SHI
  • Publication number: 20210348261
    Abstract: A method of continuously depositing a coating on a substrate comprises (a) depositing a first layer of ta-C on a substrate via a CVA process, said first layer having a first hardness and a first thickness of 100 mm or greater; (b) adjusting the parameters of the CVA process and depositing a second layer of ta-C on a substrate via a CVA process, said second layer having a second hardness and a second thickness of 10 mm or less, and (c) repeating the above steps to provide a coating comprising at least 5 such first layers and at least 4 such second layers, wherein the first thickness is greater than the second thickness and the first hardness is greater than the second hardness.
    Type: Application
    Filed: October 8, 2019
    Publication date: November 11, 2021
    Applicant: Nanofilm Technologies International Limited
    Inventors: Xu SHI, Ming Chu YANG