Abstract: Method of performing atomic layer deposition. The method comprises supplying a precursor gas towards a substrate, using a deposition head including one or more gas supplies, including a precursor gas supply. The precursor gas reacts near a surface of the substrate for forming an atomic layer. The deposition head has an output face comprising the gas supplies, which at least partly faces the substrate surface during depositing the atomic layer. The output face has a substantially rounded shape defining a movement path of the substrate. The precursor-gas supply is moved relative to the substrate by rotating the deposition head while supplying the precursor gas, for depositing a stack of atomic layers while continuously moving in one direction. The surface of the substrate is kept contactless with the output face by means of a gas bearing.

Abstract: In a method of manufacturing a multilayer device exposed surfaces of a first and second layer are joined together. Before joining a depression is created in the exposed surface of a layer and raw material, such as electrically conductive material, for forming an electric circuit is deposited in the depression, typically filling the depression. Excess material is mechanically removed before the layers are joined. In this way conductor tracks may be created between layers. When adjacent fluid chambers are provided, separated by one of the layers, the depression with the material in it makes it possible realize a sensor device with a reduced separation between the chambers.

Abstract: Fluid flows through a conduit. To measure flow speed the fluid is heated at a heating location in the conduit with a time-dependent heating strength. A speed of sound in fluid flowing in the conduit is measured at a plurality of sensing locations downstream from said heating location. The flow speed of the fluid is determined from a delay with which the time dependence is detected in the sound speeds measured at said sensing locations. In an embodiment a frequency of the variation of heating strength that is used to determine the flow speed is selected automatically dependent on the flow speed and/or other circumstances.