Abstract: A mover assembly (16) that moves or positions an object (12) includes a mover output (226), an actuator (230), and a measurement system (20). The mover output (226) is connected to the object (12), and the actuator (230) causes the mover output (226) to rotate about a first axis and move along the first axis. In this embodiment, the measurement system (20) directly measures the movement of the mover output (226) and provides feedback regarding the position of the mover output (226).
Type:
Grant
Filed:
May 30, 2003
Date of Patent:
June 28, 2005
Assignee:
New Focus, Inc., a Delaware Corporation
Inventors:
Andrew Ziegler, David F. Arnone, Evan Drake Harriman Green