Patents Assigned to Newport Corporation
  • Publication number: 20240079846
    Abstract: A method of carrier envelope phase stabilization is disclosed which includes temporally stretching a oscillator output signal to produce at least one stretcher output signal, splitting the stretcher output signal to produce a forward bypass signal, amplifying the stretcher output signal to produce at least one amplifier output signal, compressing the amplifier output signal to produce at least one compressor output signal, compressing the forward bypass signal to form at least one fast loop signal, measuring the carrier envelope offset frequency (fce) and the carrier envelope noise (fnoise) of the fast loop signal, generating at least one correction signal based on at least one of the carrier envelope offset frequency (fce) the carrier envelope noise (fnoise), and adjusting the frequency characteristic of at least one of the oscillator signal and the stretcher output signal based on the correction signal.
    Type: Application
    Filed: September 6, 2022
    Publication date: March 7, 2024
    Applicant: NEWPORT CORPORATION
    Inventor: Andreas Assion
  • Publication number: 20230332668
    Abstract: The present application discloses embodiments of a vibration isolation assembly configured to reduce the communication of excitation vibration between a supporting surface and a payload, at excitation frequencies significantly higher than the resonant frequency of the isolator. In one embodiment, the vibration isolation assembly includes a housing assembly having a housing body with a pneumatic chamber formed therein, wherein the housing assembly is supported by the supporting surface. The pneumatic chamber is configured to accept at least one fluid therein. A mass engaging member configured to support at least a portion of the payload is supported by the pneumatic chamber, and at least one thermally conductive member in thermal communication with the housing body is positioned within the pneumatic chamber. The thermally conductive member is configured to transfer thermal energy from the fluid in the pneumatic chamber to the housing body and into the ambient environment.
    Type: Application
    Filed: April 15, 2022
    Publication date: October 19, 2023
    Applicant: NEWPORT CORPORATION
    Inventor: Vyacheslav Ryaboy
  • Patent number: 11705688
    Abstract: A laser system having a multi-pass amplifier system which includes at least one seed source configured to output at least one seed signal having a seed signal wavelength, at least one pump source configured to output at least one pump signal, at least one multi-pass amplifier system in communication with the seed source and having at least one gain media, a first mirror, and at least a second mirror therein, the gain media device positioned between the first mirror and second mirror and configured to output at least one amplifier output signal having an output wavelength range, the first mirror and second mirror may be configured to reflect the amplifier output signal within the output wavelength range, and at least one optical system may be in communication with the amplifier system and configured to receive the amplifier output signal and output an output signal within the output wavelength range.
    Type: Grant
    Filed: August 13, 2020
    Date of Patent: July 18, 2023
    Assignee: NEWPORT CORPORATION
    Inventors: David E. Spence, Bor-Chyuan Hwang, Curtis Rettig, Thomas Sosnowski, Georg Wien, Victor Terpugoff, James D. Kafka
  • Publication number: 20230213746
    Abstract: A system for outputting partially spatially coherent light to an imaging system is disclosed herein, which includes a spatially coherent light source configured to output a spatially coherent signal, at least one optical device having an optical device body with a first device surface formed thereon and configured to reflect a portion of the spatially coherent signal to form at least one coherent reflected signal. The optical device body also includes a second device surface having one or more surface irregularities configured to diffuse a portion of the spatially coherent light source output signal transmitted through the optical device body, to produce at least one spatially incoherent signal. The combination of the coherent reflected signal and the spatially incoherent signal form the partially spatially coherent light signal.
    Type: Application
    Filed: July 15, 2021
    Publication date: July 6, 2023
    Applicant: Newport Corporation
    Inventors: Eliseo Ranalli, Patrick Vickroy
  • Publication number: 20220076984
    Abstract: The present application discloses a multi-axis motion system and methods of use, using an air bearing configured to position a semiconductor wafer chuck support relative to an inspection device. The air bearing includes a vacuum clamping function operative to secure the wafer chuck support to a surface formed on the underside of a structure that houses the inspection device. In one embodiment, the system includes a first positioner operative to position a carriage assembly in a first direction, the carriage assembly including a second positioner and a third positioner operative to selectively and independently travel in a second direction orthogonal to the first direction. The chuck support is secured to the positioners by one or more pivoting decoupling systems configured to transmit actuation forces from the positioners in the first and second directions, allowing the chuck support to be decoupled from the positioners when the chuck support is vacuum clamped to the underside of the structure.
    Type: Application
    Filed: September 10, 2020
    Publication date: March 10, 2022
    Applicant: Newport Corporation
    Inventors: Eric Durand, Franck Duquenoy, Joël Mendes Pereira
  • Patent number: 11195962
    Abstract: A high responsivity, high bandwidth photodiode is disclosed which includes at least one substrate, at least one n+ type layer may be formed on the at substrate and configured to receive at least a portion of an incident optical signal from the substrate, at least one supplemental layer formed on the n+ type layer and configured to receive at least a portion of the incident optical signal from the n+ type layer, at least absorbing layer formed on the supplemental layer and configured to receive at least a portion of the incident optical signal from the supplemental layer, at least one angled facet formed on the substrate and configured to direct at least a portion of the incident optical signal to at least one of the n+ type layer, the supplemental layer, and the absorbing layer at angle of incidence from 15° to 89° from a normal angle of incidence.
    Type: Grant
    Filed: February 20, 2018
    Date of Patent: December 7, 2021
    Assignee: Newport Corporation
    Inventor: Andrew C Davidson
  • Patent number: 10996419
    Abstract: A novel optical component mount is disclosed, which includes at least one first mount body with at least one adjustment member traversing through at least one adjustment member passage formed in the first mount body. At least one second mount body is configured with at least one component aperture formed therein and at least one insert receiver formed therein. The insert receiver is configured to receive at least one thermal compensating positioning insert positioned in the insert receiver. The coefficient of thermal expansion of the thermal compensating positioning insert is configured to be equal to the coefficient of thermal expansion of the adjustment member. At least one engaging body is positioned in the thermal compensating insert and engages the adjustment member. The engaging body is configured having a coefficient of thermal expansion less than the coefficient of thermal expansion of the thermal compensating positioning insert and the coefficient of thermal expansion of the adjustment member.
    Type: Grant
    Filed: September 22, 2017
    Date of Patent: May 4, 2021
    Assignee: NEWPORT CORPORATION
    Inventors: Paul Huang, James Fisher
  • Publication number: 20210124146
    Abstract: The present application discloses embodiments of a mount for optical components configured to secure thin optical components while minimizing wavefront distortion effects. The optical mount may include at least one mount body with at least one optical component receiving recess formed therein, the at least one optical component receiving recess configured to receive at least one optical component therein, the optical component having at least one edge. The mount may include one or more elastomeric retention members configured to exert at least one compliant retention force to the edge of the optical component, thereby securely retaining the optical component within the optical component receiving recess.
    Type: Application
    Filed: October 14, 2020
    Publication date: April 29, 2021
    Applicant: Newport Corporation
    Inventors: Wen Xu Jin, Warren Booth
  • Patent number: 10965247
    Abstract: An apparatus for facilitating a measurement of characteristics of a photovoltaic cell. The apparatus includes an input port for coupling to a photovoltaic cell and an output port for coupling to a measurement equipment. The apparatus is configured to couple a first resistor across positive and negative inputs of the input port and a second resistor between the negative input and ground when the input port is not selected or inactive, and decouple the first and second resistors from the input port when the input port is selected and active. The apparatus couples the positive input of the input port to the output port when the input port is selected but inactive or selected and active. The resistors protect the photovoltaic cell from adverse consequences due to incident ambient light. Examples of multiple port versions of the apparatus are also disclosed.
    Type: Grant
    Filed: November 11, 2015
    Date of Patent: March 30, 2021
    Assignee: NEWPORT CORPORATION
    Inventors: Greggory W. Switzer, Eric H. Shelton
  • Publication number: 20210066881
    Abstract: The present application is directed to various architectures of a laser oscillator which include an optical element, reflective, refractive, or diffractive injection device for injection seeding and/or locking a laser oscillator.
    Type: Application
    Filed: December 20, 2018
    Publication date: March 4, 2021
    Applicant: NEWPORT CORPORATION
    Inventor: Kay Mittler
  • Publication number: 20200373727
    Abstract: A laser system having a multi-pass amplifier system which includes at least one seed source configured to output at least one seed signal having a seed signal wavelength, at least one pump source configured to output at least one pump signal, at least one multi-pass amplifier system in communication with the seed source and having at least one gain media, a first mirror, and at least a second mirror therein, the gain media device positioned between the first mirror and second mirror and configured to output at least one amplifier output signal having an output wavelength range, the first mirror and second mirror may be configured to reflect the amplifier output signal within the output wavelength range, and at least one optical system may be in communication with the amplifier system and configured to receive the amplifier output signal and output an output signal within the output wavelength range.
    Type: Application
    Filed: August 13, 2020
    Publication date: November 26, 2020
    Applicant: NEWPORT CORPORATION
    Inventors: David E. Spence, Bor-Chyuan Hwang, Curtis Rettig, Thomas Sosnowski, Georg Wein, Victor Terpugoff, James D. Kafka
  • Patent number: 10784646
    Abstract: A laser system having a multi-pass amplifier system which includes at least one seed source configured to output at least one seed signal having a seed signal wavelength, at least one pump source configured to output at least one pump signal, at least one multi-pass amplifier system in communication with the seed source and having at least one gain media, a first mirror, and at least a second mirror therein, the gain media device positioned between the first mirror and second mirror and configured to output at least one amplifier output signal having an output wavelength range, the first mirror and second mirror may be configured to reflect the amplifier output signal within the output wavelength range, and at least one optical system may be in communication with the amplifier system and configured to receive the amplifier output signal and output an output signal within the output wavelength range.
    Type: Grant
    Filed: December 6, 2017
    Date of Patent: September 22, 2020
    Assignee: Newport Corporation
    Inventors: David E. Spence, Bor-Chyuan Hwang, Curtis Rettig, Thomas Sosnowski, Georg Wein, Victor Terpugoff, James D. Kafka
  • Patent number: 10746361
    Abstract: The present application discloses a modular broadband light source and includes at least one lamp housing defining at least one lamp body receiver having at least one outlet port formed on the lamp housing, at least one lamp body insert positionable within the body insert receiver and configured to detachably couple to the lamp housing, at least one thermal managing assembly coupled to the lamp body insert and defining a lamp receiving area, at least one Xenon arc lamp positionable in the lamp receiving area and in communication with the outlet port on the lamp housing, at least one processor device coupled to at least one of the at least one lamp housing, the at least one lamp body insert and the at least one Xenon arc lamp.
    Type: Grant
    Filed: January 15, 2018
    Date of Patent: August 18, 2020
    Assignee: Newport Corporation
    Inventors: John Park, Rob Buczala
  • Publication number: 20200251878
    Abstract: The present application discloses a cavity dumped low repetition rate infrared tunable femtosecond laser source configured to produce pulses of 200 femtoseconds or less with a peak power of four megawatts or more for use in a variety of applications including multi-photon microscopy.
    Type: Application
    Filed: January 31, 2020
    Publication date: August 6, 2020
    Applicant: NEWPORT CORPORATION
    Inventors: James KAFKA, Ching-Yuan CHIEN, Andrei FLOREAN, Travis PETERSEN, Alan Petersen
  • Patent number: 10684439
    Abstract: The disclosure relates to an apparatus for mounting optical components in a manner that self-aligns the optical axes of the optical components. The apparatus uses an optical component mount that includes a housing consisting of a single rail mount configured to mechanically couple to a portion of a rail for supporting the optical component mount on a rail. The housing also has an optical component dock configured to support an optical component in a manner that defines an optical axis. The rail mount and the optical component dock are configured to make the optical axis substantially parallel with a longitudinal axis of the rail. Using such optical component mounts secured to the rail would result in the self-alignment of the optical axes of optical components on the optical component mounts. Various embodiments of such apparatus are also provided in the disclosure.
    Type: Grant
    Filed: March 29, 2018
    Date of Patent: June 16, 2020
    Assignee: Newport Corporation
    Inventors: Wen Xu Jin, Richard Sebastian
  • Patent number: 10684440
    Abstract: The disclosure relates to an apparatus for mounting optical components in a manner that self-aligns the optical axes of the optical components. The apparatus uses an optical component mount that includes a housing consisting of a single rail mount configured to mechanically couple to a portion of a rail for supporting the optical component mount on a rail. The housing also has an optical component dock configured to support an optical component in a manner that defines an optical axis. The rail mount and the optical component dock are configured to make the optical axis substantially parallel with a longitudinal axis of the rail. Using such optical component mounts secured to the rail would result in the self-alignment of the optical axes of optical components on the optical component mounts. Various embodiments of such apparatus are also provided in the disclosure.
    Type: Grant
    Filed: March 29, 2018
    Date of Patent: June 16, 2020
    Assignee: Newport Corporation
    Inventors: Wen Xu Jin, Richard Sebastian
  • Publication number: 20200159122
    Abstract: The present application is directed to an improved immersion grating assembly that provides additional wavelength dispersion and higher optical efficiency at ultraviolet wavelengths relative to prior art devices. More specifically, the immersion grating disclosed herein may be used to narrow the spectrum of light emitted by excimer laser systems. Narrower spectral linewidth of excimer laser systems may enable the creation of smaller feature sizes in semiconductor structures manufactured using UV photolithography processes.
    Type: Application
    Filed: November 1, 2019
    Publication date: May 21, 2020
    Applicant: Newport Corporation
    Inventors: Svetlen H. Tonchev, Dilyana S. Mihalova, Jason E. Rama
  • Publication number: 20200119512
    Abstract: A high-power mode-locked laser system is disclosed herein which includes at least one pump source, at least one laser cavity formed by at least one high reflector and at least one output coupler, and at least one ytterbium-doped optical crystal positioned within the laser cavity in communication with the pump source, the ytterbium-doped optical crystal configured to output at least one output signal of at least 20 W, having a pulse width of 200 fs or less, and a repetition rate of at least 40 MHz.
    Type: Application
    Filed: December 12, 2019
    Publication date: April 16, 2020
    Applicant: NEWPORT CORPORATION
    Inventors: Joseph SCHAAR, Ching-Yuan CHIEN, Richard BOGGY, James D. KAFKA, Adi DINER
  • Patent number: 10541505
    Abstract: A high-power ytterbium-doped calcium fluoride laser system is disclosed herein which includes at least one pump source, at least one laser cavity formed by at least one high reflector and at least one output coupler, and at least one ytterbium-doped calcium fluoride optical crystal positioned within the laser cavity in communication with the pump source, the ytterbium-doped calcium fluoride optical crystal configured to output at least one output signal of at least 20 W, having a pulse width of 200 fs or less, and a repetition rate of at least 40 MHz.
    Type: Grant
    Filed: December 2, 2017
    Date of Patent: January 21, 2020
    Assignee: Newport corporation
    Inventors: Joseph Schaar, Ching-Yuan Chien, Richard Boggy, James D. Kafka, Adi Diner
  • Publication number: 20200012023
    Abstract: A lens system for use with a high laser power density scanning system is disclosed and includes a first lens group having one or more refractive optical elements therein. The first lens group is in communication with at least one high average power laser scanning system and is configured to transmit at least one high average laser power density signal there through. At least a second lens group having one or more refractive optical elements therein is in communication with the laser scanning system via the first lens group. The second lens group is configured to transmit the high average laser power density signal there through. At least one diffractive optical element may be in communication with at least one of the first lens group and the second lens group and is configured to transmit the at least one high average laser power density signal there through.
    Type: Application
    Filed: April 25, 2018
    Publication date: January 9, 2020
    Applicant: Newport Corporation
    Inventors: Richard Twedt, Daniel Hedberg, Edmund Arriola