Abstract: The present invention relates to a chromatic confocal sensor based on a geometrical phase lens, and provides a chromatic confocal sensor that can confirm a height of a specimen and a location of a height measurement point through a configuration of a simple device.
Type:
Application
Filed:
October 12, 2023
Publication date:
March 21, 2024
Applicants:
Industry-Academic Cooperation Foundation, Chosun University, neXensor Inc.
Inventors:
Ki Nam JOO, Hyo Mi PARK, Ui Hyeok KWON, Joon Ho YOU