Patents Assigned to Nikon Metrology NV
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Patent number: 11877377Abstract: There is provided a method of setting a filament demand in an x-ray apparatus. The x-ray apparatus has a filament, through which the passing of a heating current allows thermionic emission of electrons from the filament. The x-ray apparatus has a target, arranged to generate x-rays from the electrons emitted from the filament. The x-ray apparatus has a detector, arranged to detect x-rays generated by the target for forming an x-ray image. The x-ray apparatus has a controller configured to perform a measurement operation of the x-ray apparatus. The measurement measures a parameter of the x-ray apparatus. The controller is configured to set a filament demand for the filament. The filament demand correlates with the current passed through the filament. The method comprises varying the filament demand between a first value corresponding to a lower filament current and a second value corresponding to a higher filament current.Type: GrantFiled: March 6, 2020Date of Patent: January 16, 2024Assignee: NIKON METROLOGY NVInventors: Bennie Smit, Alexander Charles Wilson
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Patent number: 11680794Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.Type: GrantFiled: September 14, 2018Date of Patent: June 20, 2023Assignee: Nikon Metrology NVInventors: Anthony R. Slotwinski, Mina A. Rezk
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Publication number: 20220178687Abstract: Provided herein is a method for inspecting for a workpiece (100), the workpiece (100) comprising a slot (110) with a proximal end (P) and a distal end (D), the method comprising: receiving a dimensional model (210) of at least part of the workpiece comprising at least part of the slot (110) measured with a dimensional measurement device (300); determining a burnish region (220) of the slot (110) that is a continuous region having an essentially constant profile from the dimensional model (210); wherein the burnish region is determined by subdividing an inner mantle (214) into a plurality of slices (216) and generating and fitting a plane geometric shape (218a to 218e) to each of the respective slices (216a to 216e).Type: ApplicationFiled: March 26, 2020Publication date: June 9, 2022Applicant: NIKON METROLOGY NVInventor: Koen Delaere
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Patent number: 10989879Abstract: An optical delay between a first fiber and a second fiber is temperature compensated by combining fibers with different thermal path length changes. In some examples, fibers with different buffer coatings exhibit different path length changes per unit length and temperature. Combining such fibers in a fiber array provides a path length difference that is substantially independent of temperature.Type: GrantFiled: June 2, 2015Date of Patent: April 27, 2021Assignee: Nikon Metrology NVInventors: Anthony R. Slotwinski, Mina A. Rezk, Pavel Slyusarev
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Patent number: 10856398Abstract: Disclosed is a high-voltage generator for an x-ray apparatus. The generator comprises a voltage multiplier having a high-voltage output terminal and first and second alternating-current input terminals, an output transformer coil (12) having first and second output terminals respectively electrically connected to the first and second input terminals of the voltage multiplier, and an input transformer coil (11) having first and second input terminals and being arranged coaxially with and inductively coupled to the output transformer coil. The input and output transformer coils are relatively axially movable. Disclosed is also an x-ray apparatus using the high-voltage generator, a method of configuring a high-voltage generator and a method of configuring a high-voltage apparatus.Type: GrantFiled: August 27, 2015Date of Patent: December 1, 2020Assignee: NIKON METROLOGY NVInventors: Janusz Zywicki, Roger Hadland
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Patent number: 10614990Abstract: A target assembly for an x-ray emission apparatus, the apparatus assembly including: a vacuum chamber having at least one conductive wall; an insulating element projecting through the conductive wall; a conductive high voltage element extending along the insulating element from outside the chamber to an end portion of the insulating element furthest from the conductive wall; an x-ray-generating target arranged at the end portion of the insulating element and electrically connected to the high voltage element; and a suppressive electrode arranged at the end portion of the insulating element and configured to suppress acceleration toward the outer surface of the insulating element of electrons which are emitted from a junction between the outer surface of the insulating element and an inner surface of the conductive wall.Type: GrantFiled: December 21, 2016Date of Patent: April 7, 2020Assignee: NIKON METROLOGY NVInventor: Ian George Haig
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Patent number: 10571410Abstract: An equipment mount for an x-ray apparatus is disclosed. The mount includes a main shield element, a peripheral shield element and a secondary shield element arranged to permit a mounting element to pass through the main shield element in a shielded manner. A support apparatus for an x-ray apparatus is also disclosed. The support apparatus comprises a separable bearing for translating a support part between a first position and a second position and an elevator mechanism for translating the support part from the second position to a third position, thereby separating the bearing.Type: GrantFiled: December 14, 2018Date of Patent: February 25, 2020Assignee: NIKON METROLOGY NVInventors: Ben Price, Michael Beechey, James Smith
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Patent number: 10571409Abstract: An equipment mount for an x-ray apparatus is disclosed. The mount includes a main shield element, a peripheral shield element and a secondary shield element arranged to permit a mounting element to pass through the main shield element in a shielded manner. A support apparatus for an x-ray apparatus is also disclosed. The support apparatus comprises a separable bearing for translating a support part between a first position and a second position and an elevator mechanism for translating the support part from the second position to a third position, thereby separating the bearing.Type: GrantFiled: December 14, 2018Date of Patent: February 25, 2020Assignee: NIKON METROLOGY NVInventors: Ben Price, Michael Beechey, James Smith
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Patent number: 10478147Abstract: A calibration object is imaged in a radiographic system such as a CT system. The images are processed to calibrate the system, without prior measurement of the calibration object. Initial estimates are refined to improve accuracy.Type: GrantFiled: November 25, 2014Date of Patent: November 19, 2019Assignee: NIKON METROLOGY NVInventors: Sam Hawker, Gemma Fardell, Patrick Blankaert
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Patent number: 10463339Abstract: The invention provides a kit for assembly of an artifact for evaluating performance purposes of an X-ray CT metrology system. The artifact comprises one or more interconnectable, stackable support plates, onto which a plurality of spherical bodies is mounted. The lightweight stacked support plate structure allows for a plurality of different configurations, and can be disassembled for enhanced storage, and safe and compact transportation.Type: GrantFiled: February 6, 2014Date of Patent: November 5, 2019Assignee: Nikon Metrology NVInventors: Daniel Hilton, Diego Alfredo Punin Albarracin
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Patent number: 10365233Abstract: An equipment mount for an x-ray apparatus is disclosed. The mount comprises a main shield element, a peripheral shield element and a secondary shield element arranged to permit a mounting element to pass through the main shield element in a shielded manner. A support apparatus for an x-ray apparatus is also disclosed. The support apparatus comprises a separable bearing for translating a support part between a first position and a second position and an elevator mechanism for translating the support part from the second position to a third position, thereby separating the bearing. A manipulator stage for an x-ray apparatus is also disclosed. The stage comprises a first support structure arranged to support a sample stage and supported at first and second positions either side of the sample stage by second and third support structures, the second and third support structures being configured to allow the first support structure to raise and lower while remaining supported at both ends.Type: GrantFiled: August 12, 2015Date of Patent: July 30, 2019Assignee: NIKON METROLOGY NVInventors: Ben Price, Michael Beechey, James Smith
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Patent number: 10283228Abstract: Disclosed is an X-ray beam collimator. In one configuration, the collimator comprises an X-ray collimating portion having an X-ray transmission aperture formed therein. In one configuration, an electron absorbing portion is positioned in or arranged to overlie the X-ray transmission aperture. In one configuration, the X-ray collimating portion has a thickness in a direction through the aperture greater than a thickness in the same direction of the electron absorbing portion. In one configuration, the collimator comprises an x-ray collimating portion made of a conducting first material having an x-ray transmission aperture formed therein. In one configuration, an electron absorbing portion made of a conducting second material is arranged to plug or cover the x-ray transmission aperture. In one configuration, the first material is relatively more radiodense than the second material.Type: GrantFiled: August 12, 2015Date of Patent: May 7, 2019Assignee: NIKON METROLOGY NVInventor: Stephen M. Fletcher
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Patent number: 10267629Abstract: The present invention provides a dimensional measurement probe unit (100) for attachment to a probe head (200) of a localizer (300), comprising: a measurement probe (150) for dimensional measurement of an object (400); a revolute joint (170) integrated into the measurement probe (150); and a probe unit interface (120) for repeated dismountable connection to a probe head (200) wherein the probe unit interface (120) is revolutely connected to the measurement probe (150) by the revolute joint (170).Type: GrantFiled: April 8, 2015Date of Patent: April 23, 2019Assignee: NIKON METROLOGY NVInventors: Frank Thys, Hans Thielemans, Raf Nysen, Laurens Van Horenbeek
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Publication number: 20190025053Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.Type: ApplicationFiled: September 14, 2018Publication date: January 24, 2019Applicant: Nikon Metrology NVInventors: Anthony R. Slotwinski, Mina A. Rezk
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Patent number: 10180496Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.Type: GrantFiled: March 15, 2013Date of Patent: January 15, 2019Assignees: Nikon Corporation, Nikon Metrology NVInventors: Daniel G. Smith, Eric Peter Goodwin, Anthony R. Slotwinski, Mina A. Rezk, Alexander Cooper, Thomas M. Hedges
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Publication number: 20190013174Abstract: A charged particle device includes an electron emitting part for emitting electrons, an electron irradiated part configured to be irradiated with the electrons emitted from the electron emitting part, a container part configured to evacuate an interior thereof and contain the electron irradiated part in the interior thereof, an electric wire containing part configured to be inserted from an outside of the container part via an insertion part provided in the container part to contain an electric wire through which electricity is conducted to the electron irradiated part contained in the container part, and an insertion-part-side protrusion part configured to surround the electric wire containing part and protrude from a vicinity of the insertion part on an inner wall of the container part to an interior of the container part.Type: ApplicationFiled: December 25, 2015Publication date: January 10, 2019Applicants: NIKON CORPORATION, NIKON METROLOGY NVInventors: Atsushi YAMADA, Shohei SUZUKI, Takeshi ENDO, Takashi WATANABE, Stephen FLETCHER, Andriy DENYSOV
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Patent number: 10166076Abstract: Disclosed is a registration object for computed radiographic tomography. The object has a body portion defining a void for including at least part of a target object. The registration object comprises one or more relatively radiopaque or relatively radiolucent features. Said feature or features provide, in a suitable proportion of radiographic projections of the registration object with respect to angle about a predetermined axis, a pair of identifiable registration points which are spaced apart in a direction parallel to the predetermined axis by a first distance, and whose positions in that direction are each either a constant or a function only of the angle of the projection about the predetermined axis.Type: GrantFiled: March 27, 2014Date of Patent: January 1, 2019Assignee: NIKON METROLOGY NVInventors: Andrew Timothy Ramsey, Andrew Robert Ray
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Patent number: 10119816Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.Type: GrantFiled: March 15, 2013Date of Patent: November 6, 2018Assignee: Nikon Metrology NVInventors: Anthony R. Slotwinski, Mina A. Rezk
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Patent number: 10102997Abstract: Disclosed herein are a high-voltage generator for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target, and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerized tomography. In particular, the high-voltage generator includes a shield electrode electrically connected intermediate of a first voltage multiplier and a second voltage multiplier. The electron beam apparatus includes control photodetectors and photo emitters having a transparent conductive shield arranged therebetween. The rotary vacuum seal includes a pumpable chamber at a position intermediate between high-pressure and low-pressure ends of a bore for a rotating shaft.Type: GrantFiled: September 27, 2017Date of Patent: October 16, 2018Assignee: NIKON METROLOGY NVInventor: Roger Hadland
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Patent number: 10096446Abstract: Disclosed herein are a high-voltage generator (120) for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target (500), and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerized tomography. In particular, the high-voltage generator includes a shield electrode (123a, 123b) electrically connected intermediate of a first voltage multiplier (122a, 122b) and a second voltage multiplier (122b, 122c). The electron beam apparatus includes control photodetectors (202a, 202b—not shown) and photo emitters (201a, 202a) having a transparent conductive shield (203a and 203b, 203c—not shown) arranged therebetween.Type: GrantFiled: March 12, 2014Date of Patent: October 9, 2018Assignee: NIKON METROLOGY NVInventor: Roger Hadland