Patents Assigned to Novelx, Inc.
  • Stacked lens structure and method of use thereof for preventing electrical breakdown
    Patent number: 7335895
    Abstract: A micro-electrical system, such as a lens stack for use in a scanning electron microscope, analysis tool, etc., comprises recesses and/or serrations that increase the surface path breakdown, thereby increasing reliability and enabling high voltage operations.
    Type: Grant
    Filed: March 22, 2006
    Date of Patent: February 26, 2008
    Assignee: Novelx, Inc.
    Inventors: James Spallas, Lawrence Muray
  • System and method for multiple electron, ion, and photon beam alignment
    Patent number: 7332729
    Abstract: A beam column array included alignment marks within to enable alignment of beams with respect to each other. Specifically, the array includes an array of beam columns, each column having at least once lens. A plurality of alignment marks are located beneath the lens. A method of using the array includes: scanning a plurality of beams in a beam column array over a plurality of alignment marks; and determining beam centroid positions of the beams with respect to each other based on data from the scanning.
    Type: Grant
    Filed: June 14, 2005
    Date of Patent: February 19, 2008
    Assignee: Novelx, Inc.
    Inventors: Lawrence Muray, James Spallas
  • Layered electron beam column and method of use thereof
    Patent number: 7109486
    Abstract: An electron beam column package comprises a plurality of layers having components, such as lenses, coupled thereto. The layers may be made of LTCC, HTCC or other layer technology.
    Type: Grant
    Filed: April 4, 2005
    Date of Patent: September 19, 2006
    Assignee: Novelx, Inc.
    Inventors: James Spallas, Lawrence Muray
  • Stacked lens structure and method of use thereof for preventing electrical breakdown
    Patent number: 7045794
    Abstract: A micro-electrical system, such as a lens stack for use in a scanning electron microscope, analysis tool, etc., comprises recesses and/or serrations that increase the surface path breakdown, thereby increasing reliability and enabling high voltage operations.
    Type: Grant
    Filed: May 10, 2005
    Date of Patent: May 16, 2006
    Assignee: Novelx, Inc.
    Inventors: James Spallas, Lawrence Muray