Abstract: Disclosed is a film feeding apparatus including a turntable including a driving member and a rotation bar having a central part shaft-coupled to a rotating shaft of the driving member to be driven to rotate around the rotating shaft and driven to rotate to repeatedly perform an operation in which the rotation bar rotates by a predetermined reference angle through the driving member and is then stopped for a predetermined reference time, a film tray that is installed in a predetermined first operation region to position one of opposite ends of the rotation bar on the film tray in a state in which the rotation bar is stopped for the reference time and on which a plurality of films are located in multiple layers, gripping units coupled to the opposite ends of the rotation bar, respectively, to transfer the films along a predetermined circular trajectory around the rotating shaft by the rotation bar and provided to grip the films, and a film ejection unit that is installed in a predetermined second operation regi

Abstract: A laser processing system includes a processing machine for performing laser processing on a processing target using a laser beam according to a predetermined processing design; a setting module for preparing a processing recipe including a plurality of set values for testing of processing parameters for the controlling the quality value of a predetermined quality item; a controller for repeatedly performing test processing for the processing target in multiple implementation rounds by driving the processing machine by selectively using any one of the set values for testing as the set value of the processing parameters according to a predetermined order; and an analysis module for analyzing each of results of the test processing and individually measuring the quality value of each of the results of the test processing.

Abstract: A curl removing apparatus for a multilayer film for removing curl generated on a multilayer film including at least one of a first film having one surface on which a cohesive layer is formed and a second film attached to the cohesive layer includes a fixing unit configured to fix the first film, a separation unit including a separation roller having an outer circumference with a separation cohesive layer formed thereon, to which the second film is detachably attached, and a first roller driving member configured to drive and drive the separation roller to separate the second film attached to the separation cohesive layer from the cohesive layer of the first film while moving along the separation roller, and an attachment unit configured to reattach the second film separated from the cohesive layer of the first film to the cohesive layer of the first film.

Abstract: The present invention provides a chemical vapor deposition apparatus for a semiconductor film, containing a horizontal tubular reactor, a susceptor, a heater, a feed gas introduction portion and a reaction gas exhaust portion, where part of the tubular reactor walls inclines downward from the upstream side of the feed gas passageway towards the downstream side thereof. The present invention also provides a chemical vapor deposition method using the apparatus.