Abstract: The present invention relates to a MEMS device and related methods comprising a mirror for the measuring of light frequency. The MEMS mirror may rotate around a pivot point and is driven by a periodic force for continuous bi-directional motion without transient vibrations. The periodic force may further comprise transient functions comprising special waveforms when at the turn-around point of the bi-directional rotation.
Type:
Grant
Filed:
November 16, 2020
Date of Patent:
February 20, 2024
Assignees:
O-NET TECHNOLOGIES (GROUP) LTD., ITF TECHNOLOGIES INC.
Inventors:
Kevin Boyd, Zuowen Jiang, Yun Ren, Feng Tian