Patents Assigned to Oerlikon Leybold Vacuum GmbH
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Publication number: 20100187415Abstract: A turbomolecular pump (12) has a circular intake opening (16) distal of an inlet rotor stage (18). The intake opening (16) comprises at least two opening sections (41, 42, 43) that are separated from each other.Type: ApplicationFiled: June 5, 2008Publication date: July 29, 2010Applicant: OERLIKON LEYBOLD VACUUM GMBHInventors: Robert Schneiders, Markus Henry, Gerhard Wilhelm Walter
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Publication number: 20100176294Abstract: The invention refers to a mass spectrometer arrangement (10) comprising a housing (86) having a mass spectrometer forevacuum vacuum chamber (20) with a mass spectrometer forevacuum outlet (30), at least two mass spectrometer high-vacuum vacuum chambers (21, 22, 23), and an integrated turbomolecular pump (12) connected with the high-vacuum vacuum chambers (21, 22, 23) and having a forevacuum outlet (89). The two forevacuum outlets (30, 89) open into a common forevacuum chamber (98) in the housing (86), which in turn opens into a housing outlet (88).Type: ApplicationFiled: June 3, 2008Publication date: July 15, 2010Applicant: OERLIKON LEYBOLD VACUUM GMBHInventors: Markus Henry, Christian Beyer
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Publication number: 20100086883Abstract: Into a vacuum pump device arranged for suctional intake of a process gas (38) possibly comprising reactive particles (40), oxygen in the form of air or pure oxygen is supplied in a controlled manner via an oxygen intake (26, 26a,26b). Thus, controlled oxidation takes place in the compression chamber (24) such that the dust cannot self-ignite in case of sudden ventilation.Type: ApplicationFiled: August 7, 2007Publication date: April 8, 2010Applicant: OERLIKON LEYBOLD VACUUM GMBHInventors: Uwe Zöllig, Thomas Dreifert
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Publication number: 20100072845Abstract: The resonant frequencies of a rotor supported on magnetic bearings, in particular a rotor of a turbomolecular vacuum pump, are determined. While the rotor is stationary or the rotor is rotating at a relatively low rotation frequency, mechanical oscillations of the rotor are generated by electromagnets in the magnetic bearing. The rotor oscillations are detected by rotor-position sensors in the magnetic bearing. The resonant frequencies of the rotor are determined from the detected rotor-position oscillations.Type: ApplicationFiled: January 3, 2008Publication date: March 25, 2010Applicant: OERLIKON LEYBOLD VACUUM GMBHInventor: Ulrich Jung
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Publication number: 20100054957Abstract: In a method for determining a statement of a state of a turbomolecular pump, and in a turbomolecular pump, a vibration curve is determined with a vibration sensor (10) connected to the turbomolecular pump. The determined vibration curve is transferred to an evaluation device (12), wherein vibration amplitudes are detected by a filter (16) in the evaluation device (12) and then compared to comparative values. If a threshold value is exceeded, a warning signal is transferred to a monitoring system (30) by a remote data transfer device (28). The method allows for online monitoring of turbomolecular pumps.Type: ApplicationFiled: June 22, 2007Publication date: March 4, 2010Applicant: OERLIKON LEYBOLD VACUUM GMBHInventors: Thomas Goetze, Reiner Hoelzer, Christian Harig
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Publication number: 20100047095Abstract: A vacuum pump (10) has a vacuum-tight housing (12) and having a gas-tight electrical leadthrough assembly (20) for producing an electrical connection between an electrical component (14,16,18) within the housing (12) and the exterior of the housing. The leadthrough assembly (20) is formed by a housing opening (22), by a sealing compound body (24) seated on the opening, by an electric line in the sealing compound body (24), by a sealing ring (26) between the opening edge of the housing opening (22) and the sealing compound body (24), and by a fixing means (32) for fastening the sealing compound body (24) to the housing (12).Type: ApplicationFiled: July 18, 2007Publication date: February 25, 2010Applicant: OERLIKON LEYBOLD VACUUM GMBHInventors: Heinrich Englaender, Christian Harig
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Publication number: 20090180890Abstract: The invention relates to rotors or stators of a turbomolecular pump with rotor blades made of a specific aluminum alloy.Type: ApplicationFiled: April 27, 2007Publication date: July 16, 2009Applicant: OERLIKON LEYBOLD VACUUM GMBHInventors: Rainer Hölzer, Michael Froitzheim, Lars Etschenberg, Ishan Roth, Gernot Fischer, Dieter Sauer, Gregor Terlinde
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Patent number: 7559752Abstract: A two-shaft vacuum pump has a simplified drive motor. The two-shaft vacuum pump has a synchronous motor as a drive motor which motor rotor is permanently excited. Permanently excited motor rotors are sufficiently small and of light weight such that rotor supporting bearings can be omitted. This also eliminates the problems associated with cooling and lubrication of the supporting bearings.Type: GrantFiled: May 23, 2003Date of Patent: July 14, 2009Assignee: Oerlikon Leybold Vacuum GmbHInventors: Rudolf Bahnen, Josef Hodapp, Karl-Heinz Ronthaler
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Patent number: 7544046Abstract: A vacuum pump (10) includes a pump unit (14) and an operating unit (12) arranged spaced from the pump unit (14). The operating unit (12) is connected with the pump unit (14) for controlling it. The pump unit (14) and the operating unit (12) respectively comprise a transceiver module (20,22) for transmitting and receiving control and operational data bidirectionally in a wireless manner. The pump unit (14) and the operating unit (12) are exclusively connected with each other in a wireless manner. By the omission of electrical lines, the induction of interfering signals is excluded. Wall perforations for lead-through of electrical lines are omitted.Type: GrantFiled: April 15, 2003Date of Patent: June 9, 2009Assignee: Oerlikon Leybold Vacuum GmbHInventors: Christian Beyer, Christian Harig, Rainer Hölzer, Alois Greven, Hermann Boy
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Publication number: 20090068451Abstract: The invention relates to a process for the coating of objects made of valve metals selected from aluminum, magnesium, titanium, niobium and/or zirconium and their alloys with an oxide ceramic layer formed from the metal which has a thin barrier layer as a boundary layer towards the metal whose surface has been coated with polymers, characterized in that said polymers are introduced into the capillary system of the oxide ceramic layer in the form of dimers or halogenated dimers of general formula I wherein R1 represents one or more hydrogen or halogen residues; each R2 represents hydrogen or halogen; and R3 commonly represent a corresponding xylylene residue for completing a dimeric structure; by vacuum coating, followed by polymerizing the dimers.Type: ApplicationFiled: August 17, 2006Publication date: March 12, 2009Applicant: OERLIKON LEYBOLD VACUUM GMBHInventors: Michael Froitzheim, Josef Heppekausen
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Patent number: 7481066Abstract: A vacuum device comprises a plurality of cryopumps (10) connected with one or a plurality of vacuum chambers. The cryopumps (10) are connected via media supply conduits (12) and media return conduits (14) with a compressor (16). An adjusting device (18) is connected before at least one of the cryopumps for controlling the amount of media fed to the cryopump. Further, the cryopumps (10) comprise a temperature measuring device. The temperature measuring device and the adjusting device (18) are connected with a controller (28). To allow the desired amount of media to be fed to the cryopumps (10), the adjusting device (18) comprises a throttle (24) in a media supply conduit (12) and a controllable valve in a throttle bypass conduit (22).Type: GrantFiled: July 14, 2004Date of Patent: January 27, 2009Assignee: Oerlikon Leybold Vacuum GmbHInventors: Dirk Schiller, Holger Dietz, Gerhard Wilhelm Walter
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Patent number: 7415829Abstract: A piston compressor comprises a piston (12) which oscillates in a cylinder (14). A compressed-gas supply arrangement is provided which comprises a compressed-gas accumulator (34), a compressed-gas supply line (18) between a compressed-gas source (20) and the compressed-gas accumulator (34). Further, the compressed-gas supply line (18) comprises an inlet valve (42) which is open when the piston (12) is in a filling position. The inlet valve (42) is defined by a cylinder wall opening (22) and a piston wall opening (38) which are located opposite each other when the piston (12) is in the filling position, thus defining an open valve, and which are closed by the piston wall (40) and the cylinder wall (24), respectively, when the piston (12) is in the non-filling position, thus defining a closed valve. Thereby, a valve is provided which does not comprise any moving parts and is thus easy to manufacture, is highly reliable and has a long service life.Type: GrantFiled: December 9, 2003Date of Patent: August 26, 2008Assignee: Oerlikon Leybold Vacuum GmbHInventor: Norbert Rolff
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Patent number: 7264439Abstract: A device (1), for evacuating a chamber to pressures in the high vacuum range includes a suction-side vacuum pump (2) and an atmospheric-pressure-side vacuum pump (3). The suction-side vacuum pump (2) is a mechanical kinetic vacuum pump with a rotor (11) and a stator (10). The stator (10) has a rotationally-symmetrical inner surface which matches the outer rotor geometry. The rotor (11) in the mechanical kinetic vacuum pump (2) is provided with a structure (13) carrying out the gas pumping. Said gas pumping structure comprises webs (14), the angle and width of which decrease from the suction side to the pressure side. The gas throughflow is improved. The outer diameter of the rotor (11) and the inner diameter of the stator (10) of the suctnion-side pump decrease from the suction side to the pressure side.Type: GrantFiled: May 16, 2003Date of Patent: September 4, 2007Assignee: Oerlikon Leybold Vacuum GmbHInventors: Ralf Adamietz, Roland Blumenthal, Dirk Kalisch
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Patent number: 7240536Abstract: A test-gas leak detector (1) includes a connection (27) for a device under test, a sniffer, or a leak detector chamber, a high-vacuum pump (2), a test-gas detector (5) that is connected on the intake side of said pumps, and a test-gas conduit (28) leading from the connection of the leak detector (27). The conduit is connected to at least one intermediate stage of the high-vacuum pump (2) in addition to the pre-vacuum zone of the high-vacuum pump (2) via conduit sections (31, 32, 35) and valves (33, 34, 36). A housing (9), in which at least some of the conduits and valves and the high-vacuum pump (2) are integrated, forms part of the leak detector (1) and a detachable slide-in module (51) forms part of the high-vacuum pump. The slide-in module has an external jacket construction (53) comprising passages (58, 61) and when the leak detector (1) is operational, is situated in a receiving opening (52) that is provided in the housing (9).Type: GrantFiled: December 19, 2003Date of Patent: July 10, 2007Assignee: Oerlikon Leybold Vacuum GmbHInventors: Christian Beyer, Hermann Boy, Rainer Hölzer, Gunter Holstein
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Patent number: 7232295Abstract: A screw-type vacuum pump (1) is tempered such that characteristics of the pump are not substantially altered when the pump is subjected to thermal stress. In order to achieve said aim, cooling is adjusted according to an operating state of the screw-type vacuum pump (1), preferably to maintain a substantially constant pump gap (4).Type: GrantFiled: October 30, 2002Date of Patent: June 19, 2007Assignee: Oerlikon Leybold Vacuum GmbHInventors: Hartmut Kriehn, Klaus Rofall, Manfred Behling
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Patent number: 7213399Abstract: A refrigerator (1) has a housing (2, 14, 19), a cylindrical working chamber (15, 21), a cylindrical displacing member (11, 17), a gap (36, 38) which is located between the housing and the displacing member, a regenerator which is disposed inside the displacing member, and a device alternatingly supplying the working chamber with an effective high-pressure gas and an effective low-pressure gas. In order to overcome the disadvantages associated with gas streams occurring in the gap (36, 38), an additional regenerator (gap gas regenerator), (43) is assigned to the gap (36, 38).Type: GrantFiled: May 13, 2003Date of Patent: May 8, 2007Assignee: Oerlikon Leybold Vacuum GmbHInventors: Holger Dietz, Heinz-Josef Dubbelfeld, Jiri Melichar, Axel Persch, Mario Pietrangeli, Ernst Schnacke, André Siegel, Axel Veit
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Patent number: 7186098Abstract: A pump (1) is provided with a housing (2), having an inlet (28) and an outlet (29), a drive (5), a fixed cylinder (2) centered on a mid-axis (9), a displacer (18), rotating eccentrically within the cylinder (2), a crank drive (13) for the displacer (18), a circumferential sickle-shaped pumping chamber (26) between the cylinder (2) and displacer (18) and a helical sealing element (27, 27?, 27?, 39) in the pumping chamber (26). The pump is a dry vacuum pump, whereby the displacer (18) circulates in the cylinder (2) without making contact.Type: GrantFiled: February 18, 2003Date of Patent: March 6, 2007Assignee: Oerlikon Leybold Vacuum GmbHInventor: Thomas Dreifert
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Patent number: D617814Type: GrantFiled: May 29, 2009Date of Patent: June 15, 2010Assignee: Oerlikon Leybold Vacuum GmbHInventor: Thomas Dreifert