Abstract: A lithographic tool system for generating an interferometric pattern of light using a plurality of exposure beams includes a processor coupled to a positioning device. The processor receives a selected period for the interferometric pattern of light, and generates an angular control signal and a translational control signal in response to the selected period. The positioning device translates an exposure beam in response to the translational control signal, and rotates the exposure beam in response to the angular control signal.

Abstract: A method for reconfiguring an optical switch includes selecting a first path through a photonic crystal. The crystal includes the first path having a plurality of first regions and a second path having a plurality of second regions. The crystal also includes a third path that provides an optical signal for propagation through one of the first and second paths. The method also includes heating at least one of the first regions and at least one of the second regions. The method further includes cooling the first region at a first rate to place the first region in a first state. The first state allows propagation of the optical signal through at least a portion of the crystal. In addition, the method includes cooling the second region at a second rate to place the second region in a second state. The second state reduces the propagation of the optical signal through at least a portion of the crystal.

Abstract: An optical switch (10) includes an aligning member (12) with an aperture (28) extending between opposite sides to define an aligning groove (32). A first output waveguide (16) is in the aligning groove. An input waveguide (14) and a second output waveguide (18) are in a further groove (50) in the aligning member. The second output waveguide can move between two positions where optical signals from the input waveguide are respectively directed into the first and second output waveguides. In a variation, an aligning member (102) includes a plurality of the optical switches arranged to form a 1×N switching fabric (100). Further, two such switching fabrics (212, 213) can be coupled to define an M×N switching fabric (210).

Abstract: An optical switch for processing an optical signal includes a refractive material and an input waveguide formed in the refractive material that is operable to receive an optical signal. First and second output waveguides are also formed in the refractive material. A switchplate is coupled to the refractive material and has a first position spaced apart from the input waveguide and a second position in proximal contact with the input waveguide. When the switchplate is placed in the first position, the input waveguide totally internally reflects the optical signal toward the first output waveguide. When the switchplate is placed in the second position, the switchplate frustrates the total internal reflection of the optical signal such that the second output waveguide receives the optical signal.

Abstract: An apparatus (10) includes an optical switch (11) and a control circuit (12). The optical switch includes a member (16) which supports optical fibers (67, 68). A sliding piece (14) is movably supported on the member and also supports optical fibers (66). Movement of the sliding piece is effected by two magnetic field generators (19,49) respectively supported by the member and sliding piece, the direction of movement being controlled by varying the direction of a current flow to one of the generators, while maintaining an unchanging current flow to the other. Each generator includes a plurality of ferromagnetic poles (21, 55), and a serpentine electrical conductor (20, 50). In one operational position of the sliding piece, optical radiation follows a first optical path (87,88) through one pair of the fibers. In a different operational position, optical radiation follows a different optical path (87,89) through a different pair of the fibers (82, 83).

Abstract: A method and apparatus for interference lithography utilize a fiber having a cladding region with axially formed holes surrounding a core region. The fiber emits an optical signal to perform interference lithography. A number of alternative variations in the size and arrangement of axially formed holes produces fibers having characteristics particularly adapted for receiving, communicating, and emitting optical signals for interference lithography.

Abstract: An optical switch for processing an optical signal includes an input waveguide having a reflective surface, a first output waveguide coupled to the input waveguide, and a second output waveguide. The second output waveguide has a first position spaced apart from the reflective surface of the input waveguide such that the reflective surface totally internally reflects an optical signal toward the first output waveguide. The second output waveguide has a second position in proximal contact with the reflective surface to frustrate the total internal reflection of the optical signal such that the second output waveguide receives the optical signal.

Abstract: An optical switch includes an input member, a reflective output member coupled to the input member, and a transmissive output member. The input member supports a plurality of input waveguides, each input waveguide having a reflective surface and operable to receive a corresponding optical signal. The reflective output member supports a plurality of first output waveguides, each first output waveguide coupled to a corresponding input waveguide. The transmissive output member supports a plurality of second output waveguides and has a first position spaced apart from the input member such that the reflective surface of each input waveguide totally internally reflects a corresponding optical signal to a corresponding one of the first output waveguides, and a second position in proximal contact with the input member such that each second output waveguide frustrates the total internal reflection of a corresponding input waveguide and receives a corresponding optical signal.

Abstract: An optical switch includes an input member, a reflective output member coupled to the input member, and a transmissive output member. The input member supports a plurality of input waveguides, each input waveguide having a reflective surface and operable to receive a corresponding optical signal. The reflective output member supports a plurality of first output waveguides, each first output waveguide coupled to a corresponding input waveguide. The transmissive output member supports a plurality of second output waveguides and has a first position spaced apart from the input member such that the reflective surface of each input waveguide totally internally reflects a corresponding optical signal to a corresponding one of the first output waveguides, and a second position in proximal contact with the input member such that each second output waveguide frustrates the total internal reflection of a corresponding input waveguide and receives a corresponding optical signal.

Abstract: A method and apparatus for interference lithography utilize a fiber having a cladding region with axially formed holes surrounding a core region. The fiber emits an optical signal to perform interference lithography. A number of alternative variations in the size and arrangement of axially formed holes produces fibers having characteristics particularly adapted for receiving, communicating, and emitting optical signals for interference lithography.

Abstract: A polarization vector alignment technique for interference lithography generates a control signal indicating a difference in orientation between a polarization state of an emitted optical signal and a desired linear polarization vector. The technique adjusts the linear polarization vector to enhance the quality of the pattern produced for interference lithography.

Abstract: A system for processing an optical signal includes a reflector that reflects an input optical signal to a selected one of a number of output waveguides and reflects a reference optical signal associated with the input optical signal. A detector detects a position coordinate of the reference optical signal. A memory coupled to the detector stores an expected position coordinate for the reference optical signal. A controller coupled to the memory generates a control signal based upon the position coordinate detected by the detector and the expected position coordinate stored in the memory. An actuator coupled to the reflector positions the reflector in response to the control signal.

Abstract: An optical fiber includes an endface having a first reflective surface and a second reflective surface. The first reflective surface is formed at a first bias angle with respect to a plane that is normal to the longitudinal axis of the optical fiber. The first reflective surface totally internally reflects an optical signal at a first reflection angle with respect to the longitudinal axis. The second reflective surface is coupled to the first reflective surface and formed at a second bias angle with respect to the plane such that the second reflective surface totally internally reflects the optical signal at a selected second reflection angle.

Abstract: An optical switch for processing an optical signal includes a refractive material having a first surface, a second surface, and a third surface. A first embodiment of the optical switch includes a lens having a planar surface that is coupled to the third surface of the refractive material, and a convex surface. A second embodiment of the optical switch includes a collimating lens, a first decollimating lens, and a second decollimating lens. The optical switch further includes a switchplate coupled to the second surface of the refractive material. The switchplate has a first position spaced apart from the second surface and a second position in proximal contact with the second surface.

Abstract: An optical switch includes an input member, a reflective output member coupled to the input member, and a transmissive output member. The input member supports a plurality of input waveguides, each input waveguide having a reflective surface and operable to receive a corresponding optical signal. The reflective output member supports a plurality of first output waveguides, each first output waveguide coupled to a corresponding input waveguide. The transmissive output member supports a plurality of second output waveguides and has a first position spaced apart from the input member such that the reflective surface of each input waveguide totally internally reflects a corresponding optical signal to a corresponding one of the first output waveguides, and a second position in proximal contact with the input member such that each second output waveguide frustrates the total internal reflection of a corresponding input waveguide and receives a corresponding optical signal.

Abstract: An optical switch includes an input member, a reflective output member coupled to the input member, and a transmissive output member. The input member supports a plurality of input waveguides, each input waveguide having a reflective surface and operable to receive a corresponding optical signal. The reflective output member supports a plurality of first output waveguides, each first output waveguide coupled to a corresponding input waveguide. The transmissive output member supports a plurality of second output waveguides and has a first position spaced apart from the input member such that the reflective surface of each input waveguide totally internally reflects a corresponding optical signal to a corresponding one of the first output waveguides, and a second position in proximal contact with the input member such that each second output waveguide frustrates the total internal reflection of a corresponding input waveguide and receives a corresponding optical signal.

Abstract: A high resolution, high-throughout, large field size, production environment, lithographic tool system and method includes an interferometric pattern generator utilizing three or four mutually coherent optical beams organized in a flexible beam expansion, filtering, aperturing, and delivery system, large area pattern uniformity is attained via optimized illumination beam positioning and shaping. A passive stabilization system achieves fully modulated interferometric patterns in high mechanical and acoustical vibration manufacturing environments.

Abstract: A double exposure process is disclosed whereby a first exposure produced by conventional photolithographic techniques generates a latent negative image in a photoresist etch mask layer (22), the image subsequently employed to modulate a second exposure generated by the multiple beam interferometric lithography technique. Periodic surface relief structures (80) patterned by the second exposure and formed after development of the exposed photoresist material, are restricted to regions (52) defined by the initial exposure, with the photoresist material (54) outside these regions remaining unmodulated, or devoid of the periodic structures (80), and suitable for use as a mask in a subsequent etching process.

Abstract: An optical apparatus includes an optical fiber and a lens having a first face coupled to the optical fiber and a second face angled with respect to the first face to direct reflections generated at the second face away from the optical fiber. In one embodiment, the lens comprises a segment of a gradient index lens. In another embodiment, a connector couples the lens to a second lens that comprises a second segment of the gradient index lens. In this embodiment, a second optical fiber couples to the second lens to facilitate duplex transmission of optical signals with the first optical fiber.

Abstract: A system for determining the condition of an optical signal includes a first refractive material having an interface with a second refractive material. The first refractive material receives an optical signal. A portion of the optical signal reflects off the interface between the first refractive material and the second refractive material as a reflection signal. A signal monitoring circuit determines the condition of the optical signal using the reflection of the optical signal at the interface between the first refractive material and the second refractive material.