Abstract: To provide a photo detection device and a manufacturing method thereof, the photo detection device comprising a SPAD in which a substrate-manufacturing cost is kept sufficiently low compared to InGaAs, afterpulsing is less and DCR is also reduced. A photo detection device detecting an incident light from an object, comprising: (i) a P-type silicon (Si) substrate; (ii) a P-type germanium (Ge) layer formed by epitaxial growth on a first surface serving as a front surface of the P-type silicon (Si) substrate; and (iii) a P-type thin film silicon (Si) layer formed on the P-type germanium (Ge) layer, (iv) wherein the P-type thin film silicon (Si) layer is divided into a first region and a second region by a Shallow Trench Isolation (STI), multiple single photon avalanche diodes (SPADs) arranged in an array are formed in the first region, and a CMOS transistor circuit driving the SPADs is formed in the second region.

Abstract: The semiconductor image sensor of the present invention comprises a light receiving element formed in a silicon substrate under an insulation film of an SOI substrate comprising the silicon substrate, the insulation film formed on the silicon substrate, and a semiconductor layer formed on the insulation film, and composed of a pn junction diode formed in a vertical direction to a main surface of the silicon substrate and having sensitivity to near-infrared light, and a high voltage generating circuit configured to generate an applied voltage for applying a reverse bias voltage to the pn junction diode, and an impurity concentration of the silicon substrate is in a range of 1×1012/cm3 to 1×1014/cm3, a film thickness is in a range of 300 ?m to 700 ?m, and the applied voltage is in a range of 10 V to 60 V.

Abstract: A bidirectional optical module according to the present invention comprises light emitting elements 110, 130 that emit light to enter an optical fiber 71, a light receiving element 190 that receives light having exited the optical fiber 71 and a light branching element 160 that guides the light having exited the optical fiber 71 onto the light receiving element 190. It further includes a stray light shielding member 185 disposed between the light branching element 160 and the light receiving element 190 and having formed therein an opening 186, through which the light to enter the light receiving element 190 passes. The stray light shielding member 185 blocks stray light 100b while light 100a having exited the fiber 71 passes through the opening 186. Therefore, any increase in the extent of error in the detection of the returning light level or the position of a reflecting point is prevented.

Abstract: A bidirectional optical module according to the present invention emits light to an optical fiber and allows returning light from the optical fiber to enter and includes a plurality of light emitting elements that emit light to enter the optical fiber, a light receiving element that receives light having exited the optical fiber, and a non-reciprocal unit for making an optical path in a forward direction from the light emitting element to the optical fiber and an optical path in a backward direction from the optical fiber to the light emitting element different. Then, polarization planes of light incident on the optical fiber after being emitted from the plurality of light emitting elements are mutually orthogonal, and the non-reciprocal unit emits returning light of light emitted from the plurality of light emitting elements from the optical fiber toward the light receiving element to one light receiving element.

Abstract: A bidirectional optical module according to the present invention emits light to an optical fiber and allows returning light from the optical fiber to enter and includes a plurality of light emitting elements that emit light to enter the optical fiber, a light receiving element that receives light having exited the optical fiber, and a non-reciprocal unit for making an optical path in a forward direction from the light emitting element to the optical fiber and an optical path in a backward direction from the optical fiber to the light emitting element different. Then, polarization planes of light incident on the optical fiber after being emitted from the plurality of light emitting elements are mutually orthogonal, and the non-reciprocal unit emits returning light of light emitted from the plurality of light emitting elements from the optical fiber toward the light receiving element to one light receiving element.

Abstract: A bidirectional optical module according to the present invention comprises light emitting elements 110, 130 that emit light to enter an optical fiber 71, a light receiving element 190 that receives light having exited the optical fiber 71 and a light branching element 160 that guides the light having exited the optical fiber 71 onto the light receiving element 190. It further includes a stray light shielding member 185 disposed between the light branching element 160 and the light receiving element 190 and having formed therein an opening 186, through which the light to enter the light receiving element 190 passes. The stray light shielding member 185 blocks stray light 100b while light 100a having exited the fiber 71 passes through the opening 186. Therefore, any increase in the extent of error in the detection of the returning light level or the position of a reflecting point is prevented.