Patents Assigned to Oral 28 Inc.
  • Plasma irradiation apparatus and plasma irradiation method
    Patent number: 10199202
    Abstract: Provided are a plasma irradiation apparatus and plasma irradiation method capable of converting a silica precursor to a high quality silica film in a short time without thermal effects on the object being processed. This plasma irradiation apparatus 1 is provided with a plasma-generating unit 12 and an irradiation unit 80 for irradiating the plasma generated by the plasma-generating unit 12 on an object to be processed, and is characterized in that irradiation unit 80 comprises a coating part 85 capable of coating a liquid on the object being processed.
    Type: Grant
    Filed: April 9, 2015
    Date of Patent: February 5, 2019
    Assignee: Oral 28 Inc.
    Inventors: Toyohiko Shindo, Yumino Genba, Masuji Yamaguchi
  • PLASMA IRRADIATION APPARATUS AND PLASMA IRRADIATION METHOD
    Publication number: 20180138019
    Abstract: Provided are a plasma irradiation apparatus and plasma irradiation method capable of converting a silica precursor to a high quality silica film in a short time without thermal effects on the object being processed. This plasma irradiation apparatus 1 is provided with a plasma-generating unit 12 and an irradiation unit 80 for irradiating the plasma generated by the plasma-generating unit 12 on an object to be processed, and is characterized in that said irradiation unit 80 comprises a coating part 85 capable of coating a liquid on the object being processed.
    Type: Application
    Filed: April 9, 2015
    Publication date: May 17, 2018
    Applicant: Oral 28 Inc.
    Inventors: Toyohiko SHINDO, Yumino GENBA, Masuji YAMAGUCHI