Abstract: Apparatus and a method for removing particles from the surface of a substrate include determining respective position coordinates of the particles on the surface. A beam of electromagnetic energy is directed via an optical cleaning arm at the coordinates of each of the particles in turn, such that absorption of the electromagnetic energy at the surface causes the particles to be dislodged from the surface substantially without damage to the surface itself.

Abstract: A method and apparatus for removing contaminants from the surface of a substrate. An explosive medium is introduced into a vicinity of the substrate, and a beam of electromagnetic energy is directed toward the substrate. Absorption of the electromagnetic energy causes the explosive medium both to generate a blast wave and to form reactive species, the blast wave and the reactive species cooperating to remove the contaminants from the surface substantially without damage to the surface itself.

Abstract: A method and apparatus for removing contaminants from the surface of a substrate. An explosive medium is introduced into a vicinity of the substrate, and a beam of electromagnetic energy is directed toward the substrate. Absorption of the electromagnetic energy causes the explosive medium both to generate a blast wave and to form reactive species, the blast wave and the reactive species cooperating to remove the contaminants from the surface substantially without damage to the surface itself.

Abstract: Particles are removed from the surface of a substrate. Respective position coordinates of the particles on the surface are determined. A beam of electromagnetic energy is directed at the coordinates of each of the particles in turn, such that absorption of the electromagnetic energy at the surface causes the particles to be dislodged from the surface substantially without damage to the surface itself.

Abstract: A method of laser treatment of surfaces comprises the steps of: I) projecting onto the substrate surface laser pulses defining a beam; II) causing said beam and said surface to become relatively displaced in such a way that said beam will intersect at each number of pulses, preferably at each pulse, an area of said surface that is different from and non-adjacent to the area the beam intersected before said displacement; and III) continuing to cause that the beam and said surface to be treated so to become relatively displaced, until all of said strips have thus been treated by the laser beam.

Abstract: A method and apparatus for accelerating a laser stripping process carried out in a reactive gas mixture, comprising carrying out the stripping process in the presence of an accelerating effective amount of NxOy gas.

Abstract: A process and apparatus for carrying out the removal of a coating substance from the sidewalls of a surface to be stripped comprising, providing a laser beam incidence on the surface at an incidence angle &agr; relative to the plane of the surface being treated, wherein the angle &agr;>0, and periodically switching or gradually changing the azimuth of the beam incidence plane.

Abstract: A method of Multi-Laser Combustion (MLC) surface treatment, by irradiation with laser beams, which includes generating several laser beams having synchronized pulses and controlled delays, unifying the beams to a single beam and optically splitting every laser pulse into a number of sub-pulses.

Abstract: A process chamber for carrying out laser treatments, on the surface of an object, comprising: a base provided with object support means; a cover provided with a window substantially transmissive of laser light; gas inlet and gas outlet means; the said cover and the said base, when connected, leaving a space between the surface of the element and the inner surface of the window, in which gases flowing through the said gas inlet may flow above the surface of the object being treated and out of the process chamber through the said gas outlet.