Patents Assigned to Orbotech, Ltd.
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Publication number: 20190369459Abstract: Optical apparatus includes an acousto-optic medium and an array of multiple piezoelectric transducers attached to the acousto-optic medium. A drive circuit is coupled to apply to the piezoelectric transducers respective drive signals including at least first and second frequency components at different, respective first and second frequencies and with different, respective phase offsets for the first and second frequency components at each of the multiple piezoelectric transducers.Type: ApplicationFiled: August 19, 2019Publication date: December 5, 2019Applicant: Orbotech Ltd.Inventors: Itay Peled, Zvi Kotler, Ronald Kaminsky
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Patent number: 10471538Abstract: An apparatus for material deposition on an acceptor surface includes a transparent donor substrate having opposing first and second surfaces, and a donor film on the second surface. The apparatus additionally includes an optical assembly, which is configured to direct a beam of radiation to pass through the first surface of the donor substrate and impinge on the donor film at a location on the second surface so as to induce ejection of droplets of molten material from the donor film at an angle that is not normal to the second surface at the location onto the acceptor surface.Type: GrantFiled: June 7, 2016Date of Patent: November 12, 2019Assignee: ORBOTECH LTD.Inventors: Michael Zenou, Zvi Kotler
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Patent number: 10455137Abstract: A distance measuring system is provided for auto focusing a camera of an inspection system for inspecting a planar surface that is patterned. The system includes a pattern generator, an image sensor, an optical element(s) and a processor. The pattern generator projects a spatially random pattern toward the planar surface at an oblique angle. The optical element(s) forms the image of the reflected pattern on the image sensor and the image sensor captures an image of the spatially random pattern reflected off the planar surface. The processor processes the image of the spatially random pattern and provides auto-focus information.Type: GrantFiled: July 28, 2014Date of Patent: October 22, 2019Assignee: Orbotech Ltd.Inventors: Ofer Saphier, Doron Malka, David Fisch
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Patent number: 10451953Abstract: Optical apparatus includes an acousto-optic medium and an array of multiple piezoelectric transducers attached to the acousto-optic medium. A drive circuit is coupled to apply to the piezoelectric transducers respective drive signals including at least first and second frequency components at different, respective first and second frequencies and with different, respective phase offsets for the first and second frequency components at each of the multiple piezoelectric transducers.Type: GrantFiled: November 5, 2015Date of Patent: October 22, 2019Assignee: Orbotech Ltd.Inventors: Itay Peled, Zvi Kotler, Ronald Kaminsky
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Patent number: 10429742Abstract: A method of manufacture of objects including receiving a CAD file containing electrical circuit design data for direct writing on a surface, the CAD file including CAD data for a multiplicity of objects to be produced on the surface, automatically configuring a direct write machine to direct write direct writing data based on the CAD data on the surface in plural scans, each having a scan width less than a width of the surface, including arranging the direct writing data for the multiplicity of objects to be written in a side by side manner in each of the plural scans so as to be within the scan width, whereby stitching of direct writing data between adjacent scans is obviated and operating the direct write machine to create the multiplicity of objects on the surface.Type: GrantFiled: November 2, 2016Date of Patent: October 1, 2019Assignees: Orbotech Ltd., Laser Imaging Systems GmbHInventors: Steffen Ruecker, Stefan Heinemann, Werner Eschke, Abraham Gross
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Patent number: 10416530Abstract: Optical apparatus includes an acousto-optic medium and an array of multiple piezoelectric transducers attached to the acousto-optic medium. A drive circuit is coupled to apply to the piezoelectric transducers respective drive signals including at least first and second frequency components at different, respective first and second frequencies and with different, respective phase offsets for the first and second frequency components at each of the multiple piezoelectric transducers.Type: GrantFiled: November 5, 2015Date of Patent: September 17, 2019Assignee: Orbotech Ltd.Inventors: Itay Peled, Zvi Kotler, Ronald Kaminsky
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Publication number: 20190266693Abstract: A range differentiator useful for auto-focusing, the range differentiator including an image generator providing an image of a scene at various physical depths, a depth differentiator distinguishing portions of the image at depths below a predetermined threshold, irrespective of a shape of the portions, and providing a depth differentiated image and a focus distance ascertainer ascertaining a focus distance based on the depth differentiated image.Type: ApplicationFiled: February 22, 2019Publication date: August 29, 2019Applicant: Orbotech Ltd.Inventors: Shai WISEMAN, Yigal Katzir, Ofir Shnit, Ilia Lutsker, Chay Goldenberg
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Patent number: 10193004Abstract: A method for metallization includes providing a transparent donor substrate (34) having deposited thereon a donor film (36) including a metal with a thickness less than 2 pm. The donor substrate is positioned in proximity to an acceptor substrate (22) including a semiconductor material with the donor film facing toward the acceptor substrate and with a gap of at least 0.1 mm between the donor film and the acceptor substrate. A train of laser pulses, having a pulse duration less than 2 ns, is directed to impinge on the donor substrate so as to cause droplets (44) of the metal to be ejected from the donor layer and land on the acceptor substrate, thereby forming a circuit trace (25) in ohmic contact with the semiconductor material.Type: GrantFiled: October 19, 2015Date of Patent: January 29, 2019Assignee: ORBOTECH LTD.Inventors: Michael Zenou, Zvi Kotler
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Publication number: 20180321595Abstract: A method of manufacture of objects including receiving a CAD file containing electrical circuit design data for direct writing on a surface, the CAD file including CAD data for a multiplicity of objects to be produced on the surface, automatically configuring a direct write machine to direct write direct writing data based on the CAD data on the surface in plural scans, each having a scan width less than a width of the surface, including arranging the direct writing data for the multiplicity of objects to be written in a side by side manner in each of the plural scans so as to be within the scan width, whereby stitching of direct writing data between adjacent scans is obviated and operating the direct write machine to create the multiplicity of objects on the surface.Type: ApplicationFiled: November 2, 2016Publication date: November 8, 2018Applicants: Orbotech Ltd., Laser Imaging Systems GmbHInventors: Steffen RUECKER, Stefan HEINEMANN, Werner ESCHKE, Abraham GROSS
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Patent number: 10015887Abstract: A method for manufacturing includes coating a substrate (22) with a matrix (28) containing a material to be patterned on the substrate. A pattern (42) is fixed in the matrix by directing an energy beam to impinge on the coated substrate so as to fix the pattern in the matrix without fully sintering the pattern. The matrix remaining on the substrate outside the fixed pattern is removed, and after removing the matrix, the material in the pattern is sintered.Type: GrantFiled: February 18, 2014Date of Patent: July 3, 2018Assignee: ORBOTECH LTD.Inventors: Michael Zenou, Marc Altman, Claudio Rottman, Zvi Kotler
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Patent number: 9925797Abstract: Printing apparatus (20) includes a donor supply assembly (30), which provides a transparent donor substrate (26) having opposing first and second surfaces and a donor film formed on the second surface so as to position the donor film in proximity to a target area (28) on an acceptor substrate (22). An optical assembly (24) directs multiple output beams of laser radiation simultaneously in a predefined spatial pattern to pass through the first surface of the donor substrate and impinge on the donor film so as to induce ejection of material from the donor film onto the acceptor substrate according, thereby writing the predefined pattern onto the target area of the acceptor substrate.Type: GrantFiled: August 2, 2015Date of Patent: March 27, 2018Assignee: ORBOTECH LTD.Inventors: Zvi Kotler, Michael Zenou, Itay Peled
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Publication number: 20170336697Abstract: Optical apparatus includes an acousto-optic medium and an array of multiple piezoelectric transducers attached to the acousto-optic medium. A drive circuit is coupled to apply to the piezoelectric transducers respective drive signals including at least first and second frequency components at different, respective first and second frequencies and with different, respective phase offsets for the first and second frequency components at each of the multiple piezoelectric transducers.Type: ApplicationFiled: November 5, 2015Publication date: November 23, 2017Applicant: Orbotech Ltd.Inventors: Itay PELED, Zvi KOTLER, Ronald KAMINSKY
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Publication number: 20170178946Abstract: A method for manufacturing includes coating a substrate (22) with a matrix (28) containing a material to be patterned on the substrate. A pattern is fixed in the matrix by directing a pulsed energy beam to impinge on a locus of the pattern so as to cause adhesion of the material to the substrate along the pattern without fully sintering the material in the pattern. The matrix remaining on the substrate outside the fixed pattern is removed, and after removing the matrix, the material in the pattern is sintered.Type: ApplicationFiled: April 5, 2015Publication date: June 22, 2017Applicant: ORBOTECH LTD.Inventors: Michael Zenou, Zvi Kotler, Jonathan Ankri, Abraham Rotnemer, Oleg Ermak
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Patent number: 9599572Abstract: An optical inspection system including a first multiplicity of cameras operative to image a second multiplicity of regions on an object, a third multiplicity of illumination sources and at least one illumination manager operative to combine illumination from the third multiplicity of illumination sources and thereafter to direct illumination therefrom to the second multiplicity of regions, the at least one illumination manager including a beam distributor receiving a composite input beam of a multiplicity of non-mutually coherent, spatially concentrated laser pulses and directing a multiplicity of composite output beams of a plurality of the non-mutually coherent, spatially concentrated laser pulses to a corresponding plurality of spatially distinct locations corresponding to the second multiplicity of regions.Type: GrantFiled: April 7, 2014Date of Patent: March 21, 2017Assignee: Orbotech Ltd.Inventors: Ronen Levy, Ofer Saphier, Ariel Danan
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Patent number: 9523714Abstract: A non-mechanical contact signal measurement apparatus includes a first conductor on a structure under test and a gas in contact with the first conductor. At least one electron beam is directed into the gas so as to induce a plasma in the gas where the electron beam passes through the gas. A second conductor is in electrical contact with the plasma. A signal source is coupled to an electrical measurement device through the first conductor, the plasma, and the second conductor when the plasma is directed on the first conductor. The electrical measurement device is responsive to the signal source.Type: GrantFiled: January 15, 2014Date of Patent: December 20, 2016Assignees: PHOTON DYNAMICS, INC., ORBOTECH LTD.Inventors: Alexander Kadyshevitch, Ofer Kadar, Arie Glazer, Ronen Loewinger, Abraham Gross, Daniel Toet
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Patent number: 9523873Abstract: A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot.Type: GrantFiled: January 23, 2015Date of Patent: December 20, 2016Assignees: Orbotech Ltd., Laser Imaging Systems GmbH & Co. KGInventors: Stefan Heinemann, Wolfgang Retschke, Holger Wagner, Jonas Burghoff, Abraham Gross
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Publication number: 20160233089Abstract: A method for material deposition includes providing a transparent donor substrate (56, 60) having opposing first and second surfaces and multiple donor films (62, 64) including different, respective materials on the second surface. The donor substrate is positioned in proximity to an acceptor substrate (41), with the second surface facing toward the acceptor substrate. Pulses of laser radiation are directed to pass through the first surface of the donor substrate and impinge on the donor films so as to induce ejection of molten droplets containing a bulk mixture of the different materials from the donor films onto the acceptor substrate.Type: ApplicationFiled: October 7, 2014Publication date: August 11, 2016Applicant: Orbotech Ltd.Inventors: Michael ZENOU, Zvi KOTLER
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Publication number: 20160094760Abstract: An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.Type: ApplicationFiled: December 10, 2015Publication date: March 31, 2016Applicant: Orbotech Ltd.Inventors: Yigal KATZIR, Itay GUR-ARIE, Yacov MALINOVICH
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Patent number: 9269149Abstract: Optical apparatus includes a mount, which holds a workpiece. An array of optical heads project respective patterns of radiation onto the workpiece. A calibration assembly captures images of the respective patterns. A motion assembly, on which the calibration assembly is mounted, transports the calibration assembly among a plurality of different positions between the array of the optical heads and the mount so as to intercept and image, at each of the different positions, a respective pattern projected by a different one of the optical heads. A processor processes the images captured by the calibration assembly at the different positions so as to monitor operation of the apparatus.Type: GrantFiled: May 8, 2014Date of Patent: February 23, 2016Assignee: Orbotech Ltd.Inventors: Uri Gold, Ram Oron
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Publication number: 20160028936Abstract: A distance measuring system is provided for auto focusing a camera of an inspection system for inspecting a planar surface that is patterned. The system includes a pattern generator, an image sensor, an optical element(s) and a processor. The pattern generator projects a spatially random pattern toward the planar surface at an oblique angle. The optical element(s) forms the image of the reflected pattern on the image sensor and the image sensor captures an image of the spatially random pattern reflected off the planar surface. The processor processes the image of the spatially random pattern and provides auto-focus information.Type: ApplicationFiled: July 28, 2014Publication date: January 28, 2016Applicant: Orbotech Ltd.Inventors: Ofer SAPHIER, Doron MALKA, David FISCH