Abstract: Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Processes and articles utilizing such high purity SiOC and SiC.
Type:
Grant
Filed:
September 24, 2015
Date of Patent:
June 18, 2019
Assignee:
Pallidus, Inc.
Inventors:
Douglas M. Dukes, Ashish P. Diwanji, Andrew R. Hopkins, Walter J. Sherwood, Glenn Sandgren, Mark S. Land, Brian L. Benac
Abstract: Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Processes and articles utilizing such high purity SiOC and SiC.
Type:
Grant
Filed:
March 16, 2018
Date of Patent:
June 18, 2019
Assignee:
Pallidus, Inc.
Inventors:
Mark S. Land, Ashish P. Diwanji, Andrew R. Hopkins, Walter J. Sherwood, Douglas M. Dukes, Glenn Sandgren, Brian L. Benac
Abstract: Volumetric shapes of SiC starting materials for boule growth. Methods of controlling vapor deposition growth of SiC boules, and providing directional flux. Methods of increase the number of wafers, the number of electronic components and the number of operable devices from a single boule growth cycle.
Type:
Application
Filed:
March 29, 2018
Publication date:
October 11, 2018
Applicant:
Pallidus, Inc.
Inventors:
Douglas M. Dukes, Glenn Sandgren, Andrew R. Hopkins, Isabel Burlingham, Mark S. Land
Abstract: Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Processes and articles utilizing such high purity SiOC and SiC.
Type:
Application
Filed:
March 16, 2018
Publication date:
July 19, 2018
Applicant:
Pallidus, Inc.
Inventors:
Mark S. Land, Ashish P. Diwanji, Andrew R. Hopkins, Walter J. Sherwood, Douglas M. Dukes, Glenn Sandgren, Brian L. Benac