Abstract: A method of forming a diamond-like carbon coating in vacuum, comprising the steps of: pretreatment of the surface of the pad; placing the part into a vacuum chamber; treating the surface of the part with accelerated ions; applying a sublayer of a material onto the treated surface of the part; electric are vacuum sputtering a graphite cathode from a cathode spot and producing a carbon plasma accelerating an ion component of the carbon plasma; depositing the produced carbon plasma on the surface of the part and producing the diamond-like carbon coating. A pulsed electric are discharge is used, by which a plurality of cathode spots are excited at the end surface of the graphite cathode, cathode spots moving along the end surface of the cathode at a speed of from 10 to 30 m/s and generating a carbon plasma having an ion energy of 40 to 100 eV and an ion concentration in the plasma of 1012 to 1014 cm−3, with electrically insulating the part in the vacuum chamber.
Type:
Grant
Filed:
February 24, 2000
Date of Patent:
July 17, 2001
Assignee:
Patinor AS
Inventors:
Valery Pavlovich Goncharenko, Alexander Jakovlevich Kolpakov, Anatoly Ivanovitch Maslov
Abstract: An infrared radiation source for sensor and spectroscopic use has a thin, electrically conducting film adapted to emit infrared radiation when heated. The film is formed from a gas or vapor phase and includes a network of diamond-like carbon. Depending on the percentage of metal atoms in the film, the film may have metal atoms which are either distributed in the diamond-like carbon network or else form an additional metallic network. The metal may be tungsten, chromium, or titanium, and the film may include silicon and oxygen.