Abstract: A method of transporting a substrate with a substrate support, the method includes defining a frictional breakaway force between the substrate and the substrate support in a horizontal plane, moving the substrate in the horizontal plane along a horizontal trajectory, moving the substrate in a vertical direction along a vertical trajectory simultaneously while moving the substrate in the horizontal plane, and wherein the horizontal trajectory is determined based on the acceleration profile of the vertical trajectory and wherein the horizontal trajectory prevents the moving of the substrate from overcoming the coefficient of friction in the horizontal plane.

Abstract: A substrate transport apparatus including a lower linearly driven effector structure with spaced paddles, and an upper linearly driven end effector structure with spaced paddles and no rotating joints above a paddle of the lower end effector structure. A drive subsystem is configured to linearly drive the lower end effector structure and to linearly drive the upper end effector structure independent of the lower end effector structure.

Abstract: A robot arm includes a wrist, an end effector, and an adjustable joint coupling the end effector to the wrist. The adjustable joint includes a member received in a socket. In one example, the member is a ball. In another example, the member is a tang. In both examples, an upper flange and a lower flange can be used to couple the wrist to a forearm.

Abstract: A hybrid field electric motor includes a rotor with a rotor core rotating about an axial axis and having a rotor surface with at least one sloping edge face and a radial edge face. The stator includes a stator core and radial pole faces spaced by a gap from the radial edge face of the rotor for radially directing flux into the rotor core. The stator has sloping pole faces spaced from the sloping edge face of the rotor core for flux directed into the rotor core at an angle between radial and axial. The rotor core and/or stator core are made of a soft magnetic composite material for flux in inure than one plane in the core(s).

Abstract: A vacuum robot adapted to grip and transport a substrate. The robot includes a robot drive coupled to an arm and having an end-effector adapted to support the substrate. A robot gripper system is coupled to the end-effector including a front support having at least one hard stop, a movable contact element coupled to the end-effector, a bias device coupled to the contact element, and at least one actuator coupled to the end-effector configured to move the contact element between a release position and a grip position. The bias device is configured to passively bias the contact element in the grip position such that the contact element contacts an edge of the substrate to urge the substrate against the at least one hard stop to secure the substrate in the grip position and to passively bias the contact element in the release position such that the contact element is retained in the release position.

Abstract: A transport system includes, in a first environment, a driving screw having threads with a thread pitch. In a second environment, a driven member has a magnetic coupling with a driven member pitch substantially corresponding to the thread pitch. The magnetic coupling is coupled to a portion of threads and rotation of the driving screw displaces the magnetic coupling with respect to the driving screw.

Abstract: A system for operation of a robot including a substantially transparent display configured such that an operator can see a portion of the robot and data and/or graphical information associated with the operation of a robot. Preferably, a controller in communication with the robot and the transparent display is configured to allow the operator to control the operation of the robot.

Abstract: A substrate transport system includes a substrate cart inside a chamber and a linearly driven shuttle outside the chamber configured to levitate the substrate cart into a non contact, spaced relationship with respect to outwardly opposing sides of an interior wall of the chamber and to linearly drive the substrate cart within the chamber.

Abstract: A method of transporting a substrate with a substrate support, the method includes defining a frictional breakaway force between the substrate and the substrate support in a horizontal plane, moving the substrate in the horizontal plane along a horizontal trajectory, moving the substrate in a vertical direction along a vertical trajectory simultaneously while moving the substrate in the horizontal plane, and wherein the horizontal trajectory is determined based on the acceleration profile of the vertical trajectory and wherein the horizontal trajectory prevents the moving of the substrate from overcoming the coefficient of friction in the horizontal plane.

Abstract: A system for position sensing includes an incremental track including a plurality of sectors and a measurement subsystem. The measurement subsystem includes at least two differential read-heads each having at least one primary coil and at least two differential secondary coils, the at least two differential secondary coils of one of the at least two differential read-heads configured to generate output signals having their amplitudes modulated by the sectors of the incremental track and the at least two differential secondary coils of the other of said two differential read-heads configured to generate output signals having their amplitudes modulated by the sectors of the incremental track.