Abstract: A turbomolecular pump including a housing having a suction opening and a gas outlet opening, and a plurality of alternatingly arranged one behind another, stator and stator rings provided, respectively with support rings for supporting each a blade, with a support ring of a stator disc located adjacent to a high pressure region of the turbomolecular pump being connected with an adjacent housing part over a large surface or being formed with the adjacent housing part as one-piece part.

Abstract: A vacuum pump including a housing having a suction opening in its high-vacuum region, a gas outlet opening in its high pressure region, pump-active cooperating rotor and stator components arranged in the housing for pumping gases from the suction opening to the outlet opening, with an end of the pump-active components adjoining the high pressure region being connected with the gas outlet opening via intermediate chamber, a heating device provided in the intermediate chamber and connected with stator components, which are located in the high pressure region, by a connection having a high thermal conductibility, and thermal resistance elements for separating the heating device from the housing.

Abstract: A vacuum pump including two gas friction pumps arranged parallel to each other and having each at least one stage having an inlet communicating with a common suction region and an outlet communicating with a separate discharge region, a multi-stage pump arranged downstream of the two gas friction pumps, connection conduits for communicating the separate discharge regions with a common discharge chamber, and a conduit for communicating the common discharge chamber with the suction chamber of the downstream pump.

Abstract: A leak detector pump, including a housing having a gas outlet and a plurality of gas inlet unions, components of a high vacuum pump located in the housing, a gas analyzer associated with the housing, a union for introducing test fluid into the housing, a plurality of valve members located in the housing for controlling gas flow, and a plurality of connection elements located in the housing for guiding the gas flow between different components of the leak detector pump.

Abstract: A gas friction pump, including a housing having a suction opening, a gas outlet opening, and a plurality of rotatable and stationary components arranged in the housing and having a pump-active structure for pumping gases and maintaining a pressure ratio, and an additional gas inlet formed as a longitudinal opening extending, in a longitudinal direction thereof, over a portion of an outer edge of a rotatable component.

Abstract: A gas friction pump including a housing (1) having a suction opening (2) and a gas outlet opening (3), rotor (12) and stator (14) components arranged in the housing (1) for delivery of gases and for obtaining a pressure ratio; and an additional, at least one-stage, concave pump unit (20, 30, 40) provided at a side of the suction opening (2) and having a gas delivery structure, with the additional pump unit (20, 30, 40) being so formed that gas delivery takes place in a radial direction, and with rotor components (21, 31, 41) of the additional pump unit (20, 30, 40) being supported on the same rotor shaft (4) as the rotor components of the pump itself.

Abstract: A turbomolecular pump including a cylindrical housing, and rotor and stator discs arranged in the housing and cooperating with each other to produce a pumping effect, with the cylindrical housing being formed of at least two housing parts separated along a cylinder axis and each formed, together with respective separated sections of the stator discs, as a one-piece unit.

Abstract: A gas friction pump including a plurality of pumping active rotor and stator components arranged in the pump housing for delivery of gases and for producing a compression ration and having a diameter larger than a diameter of the suction opening formed in the housing, and a modified rotor component located adjacent to the suction opening and having a radial extent which increases starting from the suction opening in a direction of a radial extent of the pumping active rotor and stator components.

Abstract: A gas friction pump including a housing having a suction opening and an exhaust opening, main rotor and stator components arranged in the housing and cooperating with each other for delivering gases and for producing a pressure difference, and an auxiliary pumping unit provided at a side of the suction opening and having a gas delivery structure that provides for gas delivery in a radial direction, with the auxiliary pumping unit being formed of at least one stage and having auxiliary rotor and stator components, with the auxiliary rotor components being supported on the shaft which supports the main rotor components.

Abstract: A vacuum pump, including a housing having inlet and outlet; a shaft arranged in the housing and supported bearing provided in the housing, drive for rotating the shaft; and a plurality of pumping units arranged in the housing and formed each of rotational and stationary gas delivery components with the rotational components being supported on the shaft and the stationary components being connected with the housing, at least one of the pumping units consisting of a plurality of connected parallel to each other and arranged one after another in an axial direction, molecular pumping stages with each pumping stage being formed based on Gaede principle; with the molecular pumping stages being connected with each other in common connection channels.

Abstract: A turbomolecular pump including a plurality of separate one-piece stator elements, with each stator element including a respective housing part of a cylindrical housing of the pump, a stator disc, and a spacer disc that determines spacing between adjacent stator discs, and a plurality of rotor discs arranged in the pump housing and alternating with the stator disc.

Abstract: A turbomolecular pump including a plurality of rotor and stator discs alternatingly arranged with each other, a plurality of spacer rings for spacing the stator discs from each other, and at least one elastically deformable metallic member arranged between at least two spacer rings, with the stator discs, the spacer rings, and the elastically deformable metallic member forming together a stator stack.

Abstract: A vacuum system including first and second vacuum chambers, a high-vacuum pump having its inlet connected with the first vacuum chamber, a dischargeable into atmosphere, vacuum pump for evacuating both first and second vacuum chambers; a first valve for connecting an inlet of the dischargeable in atmosphere, vacuum pump with an outlet of the high-vacuum pump, and a second valve for connecting the inlet of the dischargeable in atmosphere, vacuum pump with the second vacuum chamber.

Abstract: A vacuum pump including suction and discharge regions, two gas friction pumps arranged on opposite side of the suction region and parallel to each other and each having at least one stage and a discharge region channels connecting the discharge regions and providing for gas flow from the discharge regions into a common discharge region of the two gas friction pumps, and a multi-stage pump located downstream of both gas friction pumps for compressing the gas flowing through the multi-state pump and having a suction region and a discharge region connected with the discharge region of the vacuum pump, with gas flowing into the suction region from the common discharge region of the two gas friction pumps.

Abstract: A vacuum pump including a housing having a suction flange and an outlet opening, a plurality of stationary and rotatable pump-active elements arranged in the housing, a rotor shaft for supporting the rotatable elements, a system of gas bearings for supporting the rotor shaft, with the gas bearings being substantially formed of stator elements with gas delivery conduits and gas outlets, and a system of resilient elements for connecting the stator elements with the bearing housing.

Abstract: A multirotor vacuum pump including a housing, at least two rotors located in the housing and cooperating with each other so that as a result of a contactless movement of the at least two rotors relative to each other, working chambers, into which a to-be-pumped gas is fed, are formed, with at least one of the at least two rotors being hollow, and a drive formed as an external rotor motor having its rotor elements arranged on an inner surface of the at least two rotors, and stator elements fixedly mounted inside the at least one of the at least two rotors opposite the rotor elements.

Abstract: A gas ballast system for a multi-stage positive displacement pump in which a first stage includes at least one positive displacement pump stage, is equipped with an inlet valve and an outlet valve, and is connected with the following stage by an intermediate vacuum chamber, with the gas ballast system including a first conduit for supplying gas into the intermediate vacuum chamber, and a second conduit for supplying gas from the intermediate vacuum chamber into a pump chamber of the first stage or to a suction region of the first stage.

Abstract: A vacuum apparatus including at least one vacuum pump having at least one stage and high-vacuum and fore vacuum connections, and a connection line communicating a point located between the high vacuum and fore vacuum connections with the high vacuum connection; and a method for controlling a suction speed of the at least one vacuum pump.

Abstract: A double-flow gas friction pump including a shaft supported in the pump housing and extending at a right angle to an axis of the suction port, a rotor fixedly secured on the shaft for joint rotation therewith, a stator fixedly secured in the housing and cooperating with the rotor for pumping gas, and a discharge element located in the suction region of the pump and operatively connected with the shaft for joint rotation with the shaft and the rotor for conducting the gas from the suction port directly to the stator and the rotor.

Abstract: A damping device for a rotor supported by an arrangement of magnetic bearings including at least one radial bearing formed of a stator magnet and a rotor magnet, with the damping device, including an intermediate member fixedly connected with the rotor by the stator magnet of the at least one radial bearing, and connected with a stationary part in an axial direction by connecting elements including spherical recesses formed in the intermediate member and in the stationary part and balls located in opposite recesses of the intermediate member and the stationary part, with spherical recesses having a diameter larger than a diameter of the balls, and with the balls or surfaces of the recesses being formed of an elastically deformable material having a modulus of elasticity smaller than a modulus of elasticity of a metal.