Abstract: In order to provide a separator for fuel cells, or a current collecting member for fuel cells, which has low contact resistance, excellent corrosion resistance and which can be economically manufactured, and a manufacturing method thereof, this separator for fuel cells comprises a substrate having iron or aluminum as the main component, a gas barrier film formed directly on said substrate and having excellent corrosion resistance, and a conductive resin film formed on the gas barrier film and containing a conductive ceramics or graphite particles having a particle diameter of 1-20 ?m.

Abstract: A plasma treatment apparatus is provided to suppress plasma from being generated between an antenna conductor and a lid to prevent contamination inside a vacuum chamber and to put an elongated antenna unit to practical use. The plasma treatment apparatus includes a vacuum chamber that accommodates a treatment target; an inductively coupling antenna unit that generates plasma in the vacuum chamber; and a high frequency power source that supplies a high frequency power to the inductively coupling antenna unit. The inductively coupling antenna unit has one or a plurality of antenna conductors and a lid that covers an opening formed in a wall surface of the vacuum chamber, and the one or plurality of antenna conductors are attached to the lid without a gap where discharge may occur.

Abstract: A plasma treatment apparatus includes a plurality of plasma treatment chambers S2 to S6 in which a plasma treatment is performed on a base material X, a tray Y configured to hold the base material X in a standing posture, and a lift mechanism 10 configured to continuously convey the tray Y to the plurality of plasma treatment chambers S2 to S6 in order to continuously perform a plasma treatment even when the base material is difficult to wind on a roll.

Abstract: In order to provide a separator for fuel cells, or a current collecting member for fuel cells, which has low contact resistance, excellent corrosion resistance and which can be economically manufactured, and a manufacturing method thereof, this separator for fuel cells comprises a substrate having iron or aluminum as the main component, a gas barrier film formed directly on said substrate and having excellent corrosion resistance, and a conductive resin film formed on the gas barrier film and containing a conductive ceramics or graphite particles having a particle diameter of 1-20 ?m.

Abstract: In order to provide a separator for fuel cells, or a current collecting member for fuel cells, which has low contact resistance, excellent corrosion resistance and which can be economically manufactured, and a manufacturing method thereof, this separator 110 for fuel cells comprises a substrate 11 having iron or aluminum as the main component, a gas barrier film 12 formed directly on said substrate 11 and having excellent corrosion resistance, and a conductive resin film 13 formed on the gas barrier film 12 and containing a conductive ceramic or graphite particles having a particle diameter of 1-20 ?m.

Abstract: A plasma treatment apparatus is provided to suppress plasma from being generated between an antenna conductor and a lid to prevent contamination inside a vacuum chamber and to put an elongated antenna unit to practical use. The plasma treatment apparatus includes a vacuum chamber that accommodates a treatment target; an inductively coupling antenna unit that generates plasma in the vacuum chamber; and a high frequency power source that supplies a high frequency power to the inductively coupling antenna unit. The inductively coupling antenna unit has one or a plurality of antenna conductors and a lid that covers an opening formed in a wall surface of the vacuum chamber, and the one or plurality of antenna conductors are attached to the lid without a gap where discharge may occur.

Abstract: In order to ensure quality even when a sheet-like base material is thin while improving efficiency of production, a plasma treatment apparatus disclosed herein includes a plasma treatment chamber X for treating a sheet-like base material Z with plasma, a high-frequency antenna 3 for generating plasma in the plasma treatment chamber X, and a feeding mechanism 10 for feeding the sheet-like base material Z into the plasma treatment chamber X in a vertical direction.

Abstract: In order to ensure quality even when a sheet-like base material is thin while improving efficiency of production, a plasma treatment apparatus disclosed herein includes a plasma treatment chamber X for treating a sheet-like base material Z with plasma, a high-frequency antenna 3 for generating plasma in the plasma treatment chamber X, and a feeding mechanism 10 for feeding the sheet-like base material Z into the plasma treatment chamber X in a vertical direction.

Abstract: In order to provide a separator for fuel cells, or a current collecting member for fuel cells, which has low contact resistance, excellent corrosion resistance and which can be economically manufactured, and a manufacturing method thereof, this separator 110 for fuel cells comprises a substrate 11 having iron or aluminum as the main component, a gas barrier film 12 formed directly on said substrate 11 and having excellent corrosion resistance, and a conductive resin film 13 formed on the gas barrier film 12 and containing a conductive ceramic or graphite particles having a particle diameter of 1-20 ?m.