Abstract: A plasma processing apparatus may include a mechanism for generating a plasma, a processing platform for supporting a substrate to be processed, and a voltage waveform generator having an output electrically coupled to the processing platform. The voltage waveform generator includes a plurality of first buck converters arranged in parallel and coupled to the output. The first buck converters include actively switchable semiconductor switches. A control unit is configured to operate the actively switchable semiconductor switches through pulse width modulation signals, and the control unit is configured to operate the plurality of first buck converters in an interleaved manner.

Abstract: Capacitor assembly, comprising a printed circuit board comprising a first conductive trace and a second conductive trace, and a first row of capacitors comprising a plurality of surface mounted capacitor elements. Each of the plurality of surface mounted capacitor elements comprises a pair of outer electrodes, one of the pair being mounted to the first conductive trace and defining a first junction, and the other one being mounted to the second conductive trace defining a second junction. The first junction and the second junction define a first capacitor longitudinal axis. The first conductive trace has a first current flow direction with a first oblique angle relative to the first capacitor longitudinal axis.

Abstract: Electrical converters of the present disclosure feature a boost circuit that is fully integrated with a three phase bridge rectifier to allow for obtaining a pulsed voltage at the rectifier output. Actively switchable semiconductor switches of the boost circuit are controlled by pulse width modulation (PWM) control signals to obtain the pulsed voltage. PWM of this pulsed voltage allows control of two out of three currents at the three input terminals of the rectifier, i.e., the currents at the phase inputs having the highest and the lowest voltage levels of the three phase input voltage.

Abstract: A radiofrequency power amplifier includes a balun transformer and a plurality of power transistor pairs arranged in a push-pull configuration. The balun transformer has an unbalanced coil extending between a first single-ended signal terminal and a first reference, and a balanced coil extending between a first balanced signal terminal and a second balanced signal terminal. The balun transformer also includes an auxiliary coil electrically isolated from the unbalanced coil and the balanced coil. The auxiliary coil is inductively coupled to the unbalanced coil and extends between a third balanced signal terminal and a fourth balanced signal terminal forming a balanced combiner-divider. An output of a first one of the power transistor pairs is coupled to the first and second balanced signal terminals and an output of a second one of the power transistor pairs is coupled to the third and fourth balanced signal terminals.

Abstract: An electrical converter for conversion between a three-phase AC signal and a DC signal may include a phase selector for connecting the three phase terminals to a first, a second, and a third intermediate node, a first buck circuit having a first switch-node terminal connected to the first DC terminal, and a second buck circuit having a second switch-node terminal connected to the second DC terminal. The first and second buck circuits convert a voltage at the first, second, and third intermediate node to a voltage between the first and second DC terminal. The first and second buck circuits are connected in series between the first and second intermediate node, and include at least one actively switchable device connected between the common node and the third intermediate node.

Abstract: Methods and devices for generating a voltage waveform at an output may include providing four DC voltages of different magnitudes. The first (V1) magnitude is higher than the third (V3) and fourth (V4) magnitude. The fourth DC voltage is coupled to the output followed by coupling the first DC voltage to the output, to bring an output voltage (VP) at the output to a high level. The first DC voltage is decoupled from the output, followed by coupling the third DC voltage to the output, to obtain a drop of the output voltage (VP). A ground potential (V0) is coupled to the output following coupling the third DC voltage and the second DC current (I2) is coupled to the output following coupling the ground potential, wherein the second DC current ramps down the output voltage (VP).

Abstract: A multiphase converter topology is used for the transmission of electrical energy from an AC voltage input with m grid phase connections to a DC voltage output or vice versa. It has a power part with half-bridges for switching currents, an AC voltage filter between the power part and the AC voltage input, and DC voltage block(s) connected between the power part and the DC output. The AC voltage filter has alternating voltage filter stage(s) with m+1 input connections, m+1 output connections and a ground connection. The m grid phase connections are thereby connected in parallel to one another and form a first phase connection for the connection of a single-phase AC voltage. A neutral conductor connection of the AC voltage filter forms a neutral conductor connection of the AC voltage input and a second phase connection for the connection of the single-phase AC voltage.

Abstract: An electric field-reducing insulating layer is described for an inductive coil. In some examples, a first coil having at least one first winding is arranged for being driven at a first voltage. A solid insulating layer is adjacent the first coil and has a first surface facing the first coil. The first surface of the solid insulating layer has a first groove between the first winding and the insulating layer, having a width that is smaller than a diameter of the electrical wire. The first groove forms a pocket between the first winding and the solid insulating layer.

Abstract: A multiphase converter topology is used for the transmission of electrical energy from an AC voltage input with m grid phase connections to a DC voltage output or vice versa. It has a power part with half-bridges for switching currents, an AC voltage filter between the power part and the AC voltage input, and DC voltage block(s) connected between the power part and the DC output. The AC voltage filter has alternating voltage filter stage(s) with m+1 input connections, m+1 output connections and a ground connection. The m grid phase connections are thereby connected in parallel to one another and form a first phase connection for the connection of a single-phase AC voltage. A neutral conductor connection of the AC voltage filter forms a neutral conductor connection of the AC voltage input and a second phase connection for the connection of the single-phase AC voltage.

Abstract: A converter for converting a three-phase AC input into a DC output may include three phase input terminals and two output terminals, a phase selector for connecting the three-phase AC input to an upper intermediate node, a lower intermediate node, and a middle intermediate node. The phase selector includes semiconductor switches for selectively connecting the middle intermediate node to the three phase input terminals, and a controller. The electrical converter includes a boost circuit and a buck-boost circuit. The boost circuit includes an upper boost circuit, a lower boost circuit, and a common node. The buck-boost circuit has an output connected to the two output terminals in parallel with an output of the boost circuit, and includes at least two semiconductor switches that are actively switchable and connected in series across the output terminals. The middle intermediate node is connected to a common node of the two second semiconductor switches.