Patents Assigned to ProMOS Technologies, Inc.
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Patent number: 7538018Abstract: A method for fabricating a gate structure is provided. A pad oxide layer, a pad conductive layer and a dielectric layer are sequentially formed over a substrate. A portion of the dielectric layer is removed to form an opening exposing a portion of the pad conductive layer. A liner conductive layer is formed to cover the dielectric layer and the pad conductive layer. A portion of the liner conductive layer and a portion of the pad conductive layer are removed to expose a surface of the pad oxide layer to form a conductive spacer. The pad oxide layer is removed and a gate oxide layer is formed over the substrate. A first gate conductive layer and a second gate conductive layer are sequentially formed over the gate oxide layer. A portion of the gate oxide layer is removed and a cap layer to fill the opening.Type: GrantFiled: February 2, 2007Date of Patent: May 26, 2009Assignee: ProMOS Technologies Inc.Inventor: Jung-Wu Chien
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Publication number: 20090130818Abstract: A method for preparing a recessed gate structure comprises the steps of: forming a shallow trench isolation structure surrounding an active area in a silicon substrate, wherein an etching barrier layer is formed on the surface of the shallow trench isolation structure; forming a plurality of gate trenches in the active area of the silicon substrate by performing an etching process; and forming a recessed gate structure by filling the gate trench with a predetermined height.Type: ApplicationFiled: January 29, 2008Publication date: May 21, 2009Applicant: PROMOS TECHNOLOGIES INC.Inventor: TSUNG TE LIN
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Publication number: 20090127535Abstract: A phase change memory device is disclosed, including a substrate. The phase change memory also includes a bottom electrode. A conductive structure with a cavity is provided to electrically contact the bottom electrode, wherein the conductive structure includes sidewalls with different thicknesses. A phase change spacer is formed to cross the sidewalls with different thicknesses. A top electrode is electrically contacted to the phase change spacer.Type: ApplicationFiled: September 5, 2008Publication date: May 21, 2009Applicants: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, POWERCHIP SEMICONDUCTOR CORP., NANYA TECHONLOGY CORPORATION, PROMOS TECHNOLOGIES INC., WINDBOND ELECTRONICS CORP.Inventors: Wei-Su Chen, Chih-Wei Chen, Frederick T. Chen
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Publication number: 20090127618Abstract: A multi-fin field effect transistor includes a substrate, an oxide layer, a conductive layer, a gate oxide layer, and a doped region. The substrate is surrounded by a trench, and there are at least two fin-type silicon layers formed in the substrate in a region prepared to form a gate thereon. The oxide layer is disposed in the trench and the top surface of the oxide layer is lower than that of the fin-type silicon layers. The conductive layer is disposed in the region prepared to form a gate. The top surface of the conductive layer is higher than that of the fin-type silicon layers. The gate oxide layer is disposed between the conductive layer and the fin-type silicon layers and disposed between the conductive layer and the substrate. The doped region is disposed in the substrate on both sides of the conductive layer.Type: ApplicationFiled: January 22, 2009Publication date: May 21, 2009Applicant: PROMOS TECHNOLOGIES INC.Inventor: Hsiao-Che Wu
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Patent number: 7535050Abstract: A memory structure comprising a plurality of memory cells is described. Each memory cell comprises a substrate, a shallow trench isolation, a spacer, a tunnel oxide, and a floating gate. The shallow trench isolation in the substrate is used to define an active area. The spacer is at the sidewall of the shallow trench isolation and is higher than the shallow trench isolation. The tunnel oxide is on the active area. The floating gate is on the tunnel oxide.Type: GrantFiled: November 15, 2005Date of Patent: May 19, 2009Assignee: ProMos Technologies Inc.Inventors: Chih-Ping Chung, Chun-Nan Lin, Chung-Yi Chen, Hung-Kwei Liao
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Publication number: 20090122599Abstract: An embodiment of a writing system for a phase change memory based on a present application is disclosed. The writing system comprises a first phase change memory (PCM) cell, a second PCM cell, a first writing circuit and a verifying circuit. The first writing circuit executes a writing procedure, receives and writes a first data to the first PCM cell. The verifying circuit executes a verifying procedure and the circuit further comprises a processing unit and a second writing circuit. The processing unit reads and compares the data stored in the second PCM cell with a second data. The second writing circuit writes the second data to the second PCM cell when the data stored in the second PCM cell and the second data are not matched.Type: ApplicationFiled: July 1, 2008Publication date: May 14, 2009Applicants: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, POWERCHIP SEMICONDUCTOR CORP., NANYA TECHNOLOGY CORPORATION, ProMOS TECHNOLOGIES INC., WINBOND ELECTRONICS CORP.Inventors: Shyh-Shyuan SHEU, Lieh-Chiu LIN, Pei-Chia CHIANG, Wen-Pin LIN
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Patent number: 7531438Abstract: A method of fabricating a recess channel transistor is provided. First, a hard mask is formed on a doped-semiconductor layer and a substrate. The doped-semiconductor layer and the substrate are etched to form a trench and define a source/drain in the doped-semiconductor layer. An implantation process is performed with a tilt angle on sidewalls of the trench to form an implant area. A thermal oxidation process is performed to form an oxide layer. The oxide layer comprises a first thickness on the source/drain in the sidewalls of the trench and a second thickness on the other portion in the sidewalls of the trench.Type: GrantFiled: July 24, 2006Date of Patent: May 12, 2009Assignee: ProMOS Technologies Inc.Inventors: Jih-Wen Chou, Chih-Hsun Chu, Hsiu-Chuan Shu
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Publication number: 20090117699Abstract: A method for preparing a recessed transistor structure comprises the steps of performing an implanting process to form a doped layer in a substrate, forming a plurality of gate-isolation blocks on the substrate, forming a plurality of first spacers on sidewalls of the gate-isolation blocks, removing a portion of the substrate not covered by the first spacers and the gate-isolation blocks to form a plurality of depressions in the substrate between the first spacers, forming a gate oxide layer on inner sidewalls of the depressions, and forming a gate structure on the gate oxide layer to complete the recessed transistor structure.Type: ApplicationFiled: February 19, 2008Publication date: May 7, 2009Applicant: PROMOS TECHNOLOGIES INC.Inventor: HUNG YANG LIN
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Patent number: 7524732Abstract: A semiconductor device with an L-shape spacer and the method for manufacturing the same are provided. The semiconductor device comprises a substrate, a composite spacer, and a tunnel insulating layer. The substrate comprises a shallow trench isolation structure and a neighboring active area. The composite spacer is formed on the sidewall of the shallow trench isolation structure, and further comprises a first insulating layer and an L-shape second insulating layer spacer, wherein the first insulating layer is located between the L-shape second insulating layer spacer and the substrate. The tunnel insulating layer is located on the substrate of the active area and connects to the first insulating layer of the composite spacer on its corresponding side.Type: GrantFiled: August 21, 2006Date of Patent: April 28, 2009Assignee: Promos Technologies Inc.Inventors: Chung-We Pan, Shi-Cheng Lin, Ching-Hung Fu, Chih-Ping Chung
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Publication number: 20090101880Abstract: An exemplary memory device includes a first dielectric layer with a first conductive contact therein. A phase change material (PCM) is disposed on top of the first dielectric layer and provided with an insulating layer integrally on a top surface of the PCM. A first electrode is disposed over the first dielectric layer and covered a portion of the first conductive contact and the insulating layer in a first direction, contacting to the first conductive contact and a first side of the PCM. A second electrode is disposed over the first dielectric layer and covered a portion of the insulating layer in a second direction, contacting to a second side of the PCM. A second dielectric layer is disposed over the first dielectric layer to cover the first electrode, the second electrode, the insulating layer and the PCM, including a second conductive contact connected to the second electrode.Type: ApplicationFiled: December 26, 2007Publication date: April 23, 2009Applicants: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, POWERCHIP SEMICONDUCTOR CORP., NANYA TECHNOLOGY CORPORATION, PROMOS TECHNOLOGIES INC., WINBOND ELECTRONICS CORP.Inventor: Li-Shu Tu
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Publication number: 20090101884Abstract: Phase change memory devices and methods for fabricating the same are provided. A phase change memory device includes a first conductive electrode disposed in a first dielectric layer. A second dielectric layer is disposed over the first dielectric layer. A phase change material layer is disposed in the second dielectric layer and electrically connected to the first conductive electrode. A space is disposed in the second dielectric layer to at least isolate a sidewall of the phase change material layer and the second dielectric layer adjacent thereto. A second conductive electrode is disposed in the second dielectric layer and electrically connected to the phase change material layer.Type: ApplicationFiled: January 17, 2008Publication date: April 23, 2009Applicants: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, POWERCHIP SEMICONDUCTOR CORP., NANYA TECHNOLOGY CORPORATION, PROMOS TECHNOLOGIES INC., WINBOND ELECTRONICS CORP.Inventor: Li-Shu Tu
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Patent number: 7521372Abstract: A phase-change memory and fabrication method thereof. The phase-change memory comprises a transistor, and a phase-change material layer. In particular, the phase-change material layer is directly in contact with one electrical terminal of the transistor. Particularly, the transistor can be a field effect transistor or a bipolar junction transistor.Type: GrantFiled: December 29, 2006Date of Patent: April 21, 2009Assignees: Industrial Technology Research Institute, Powerchip Semiconductor Corp., Nanya Technology Corporation, ProMOS Technologies Inc., Winbond Electronics Corp.Inventor: Frederick T Chen
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Publication number: 20090096038Abstract: A power metal-oxide-semiconductor field-effect transistor (MOSFET) array structure is provided. The power MOSFET array is disposed under a gate pad, and space under the gate pad can be well used to increase device integration. When the array and the conventional power MOSFET array disposed under the source pad are connected to an array pair by using circuit connection region, the same gate pad and source pad can be shared, so as to achieve an objective of increasing device integration.Type: ApplicationFiled: May 6, 2008Publication date: April 16, 2009Applicant: ProMOS Technologies Inc.Inventor: Ting-Shing Wang
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Patent number: 7510955Abstract: A multi-fin field effect transistor includes a substrate, an oxide layer, a conductive layer, a gate oxide layer, and a doped region is provided. The substrate is surrounded by a trench, and there are at least two fin-type silicon layers formed in the substrate in a region prepared to form a gate thereon. The oxide layer is disposed in the trench and the top surface of the oxide layer is lower than that of the fin-type silicon layers. The conductive layer is disposed in the region prepared to form a gate. The top surface of the conductive layer is higher than that of the fin-type silicon layers. The gate oxide layer is disposed between the conductive layer and the fin-type silicon layers and disposed between the conductive layer and the substrate. The doped region is disposed in the substrate on both sides of the conductive layer.Type: GrantFiled: August 2, 2006Date of Patent: March 31, 2009Assignee: ProMOS Technologies Inc.Inventor: Hsiao-Che Wu
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Patent number: 7511333Abstract: A memory cell (110) has a plurality of floating gates (120L, 120R). The channel region (170) comprises a plurality of sub-regions (220L, 220R) adjacent to the respective floating gates, and a connection region (210) between the floating gates. The connection region has the same conductivity type as the source/drain regions (160) to increase the channel conductivity. Therefore, the floating gates can be brought closer together even though the inter-gate dielectric (144) becomes thick between the floating gates, weakening the control gate's (104) electrical field in the channel.Type: GrantFiled: October 6, 2005Date of Patent: March 31, 2009Assignee: ProMOS Technologies Inc.Inventors: Yue-Song He, Chung Wai Leung, Jin-Ho Kim, Kwok Kwok Ng
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Publication number: 20090080243Abstract: Devices controlling a phase change storage element and methods for increasing reliability of a phase change storage element. The invention introduces a first operation mode and a second operation mode. A reference phase change storage element is forced a write current for an ideal conduction period in the first operation mode. In the second operation mode, the invention generates a proper conduction period based on the resistance of the reference phase change storage element, and forces the write current into the controlled phase change storage element for the proper conduction period.Type: ApplicationFiled: June 19, 2008Publication date: March 26, 2009Applicants: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, POWERCHIP SEMICONDUCTOR CORP., NANYA TECHNOLOGY CORPORATION, PROMOS TECHNOLOGIES INC., WINBOND ELECTRONICS CORP.Inventors: Pei-Chia Chiang, Shyh-Shyuan Sheu, Lieh-Chiu Lin, Wen-Pin Lin
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Publication number: 20090078926Abstract: A phase change memory device comprising an electrode, a phase change layer crossing and contacting the electrode at a cross region thereof, and a transistor comprising a source and a drain, wherein the drain of the transistor electrically connects the electrode or the phase change layer is disclosed.Type: ApplicationFiled: December 4, 2008Publication date: March 26, 2009Applicants: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, POWERCHIP SEMICONDUCTOR CORP., NANYA TECHNOLOGY CORPORATION, PROMOS TECHNOLOGIES INC., WINBOND ELECTRONICS CORP.Inventor: Chien-Min Lee
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Publication number: 20090065758Abstract: A phase change memory array is disclosed, comprising a first cell having a patterned phase change layer, and a second cell having a patterned phase change layer, wherein the patterned phase change layer of the first cell and the patterned phase change layer of the second cell are disposed at different layers.Type: ApplicationFiled: January 25, 2008Publication date: March 12, 2009Applicants: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, POWERCHIP SEMICONDUCTOR CORP., NANYA TECHNOLOGY CORPORATION, PROMOS TECHNOLOGIES INC., WINBOND ELECTRONICS CORP.Inventor: Te-Sheng Chao
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Publication number: 20090057643Abstract: A phase change memory device is disclosed. A second conductive spacer is under a first conductive spacer. A phase change layer comprises a first portion substantially parallel to the first and second conductive spacers and a second portion on top of the second conductive spacer, wherein the second conductive spacer is electrically connected to the first conductive spacer through the second portion of the phase change layer.Type: ApplicationFiled: September 4, 2007Publication date: March 5, 2009Applicants: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, POWERCHIP SEMICONDUCTOR CORP., NANYA TECHNOLOGY CORPORATION, PROMOS TECHNOLOGIES INC., WINBOND ELECTRONICS CORP.Inventor: Frederick T. Chen
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Publication number: 20090057640Abstract: A phase-change memory element and fabrication method thereof is provided. The phase-change memory element comprises an electrode. A first dielectric layer is formed on the substrate. An opening passes through the first dielectric layer exposing the electrode. A heater with an extended part is formed in the opening, wherein the extended part protrudes the opening. A second dielectric layer surrounds the extended part of the heater exposing the top surface of the extended part. A phase-changed material layer is formed on the second dielectric layer to directly contact the top of the extended part.Type: ApplicationFiled: December 26, 2007Publication date: March 5, 2009Applicants: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE, POWERCHIP SEMICONDUCTOR CORP., NANYA TECHNOLOGY CORPORATION, PROMOS TECHNOLOGIES INC., WINBOND ELECTRONICS CORP.Inventors: Yung-Fa Lin, Yen-Wen Wang