Abstract: The invention relates to a method for increasing the purity of oligosilanes and/or oligosilane compounds, in which a first liquid substance mixture formed from at least 50% oligosilane compounds comprising inorganic oligosilanes and/or halogenated oligosilanes and/or organically substituted oligosilanes is provided, and the first liquid substance mixture is subjected to at least one purification sequence, wherein in a first step a) the liquid substance mixture is temperature adjusted to a temperature at which at least one fraction of the oligosilane compounds solidify, and in a second step b) at least one fraction of the liquid substance mixture is separated.