Abstract: A mounting mechanism for the probe head of a Scanning Probe Microscope (SPM) includes two dovetail and two right and left threaded pushdown screws, for convenient mounting and clamping of the probe head. After inserting the probe head between the upper and lower dovetails of the z stage, handles of the pushdown screws are turned so that the lower portion of the upper dovetail rail clamp down the probe head. This mounting mechanism using the dovetail rails and pushdown screws ensures rigid mount and convenient use of the probe head at the same time.
Type:
Grant
Filed:
January 12, 2004
Date of Patent:
October 4, 2005
Assignee:
PSIA Corporation
Inventors:
Joonhyung Kwon, Young Seok Kim, Sang-il Park
Abstract: A mounting mechanism for the probe tip of a Scanning Probe Microscope (SPM) includes a scanner supported by a stationary frame, and a kinematic mechanism supported by the scanner. The kinematic mechanism includes at least three protrusions and at least one magnet. The mounting mechanism for the probe tip also includes a chip mount having a hole, a slot and a flat surface. The chip mount, on being held by the magnet, provides an easy way to mount the probe tip without requiring any tools.
Type:
Grant
Filed:
December 29, 2003
Date of Patent:
September 20, 2005
Assignee:
PSIA Corporation
Inventors:
Joonhyung Kwon, Young Seok Kim, Sang-il Park
Abstract: A scanning probe microscope uses two different scanners (also called “scanning stages”) that are completely detached each from the other, and are physically separated by a stationary frame. One scanner (called “x-y scanner”) scans a sample in a plane (also called “x-y plane”), while the other scanner (called “z scanner”) scans a probe tip (which is supported at a free end of a cantilever) in a direction (also called “z direction”) perpendicular to the plane. Detachment of the two scanners from one another eliminates crosstalk.
Type:
Application
Filed:
December 29, 2003
Publication date:
July 22, 2004
Applicant:
PSIA Corporation
Inventors:
Joonhyung Kwon, Young Seok Kim, Sang-il Park
Abstract: A scanning probe microscope uses two different scanners (also called “scanning stages”) that are completely detached each from the other, and are physically separated by a stationary frame. One scanner (called “x-y scanner”) scans a sample in a plane (also called “x-y plane”), while the other scanner (called “z scanner”) scans a probe tip (which is supported at a free end of a cantilever) in a direction (also called “z direction”) perpendicular to the plane. Detachment of the two scanners from one another eliminates crosstalk.
Type:
Application
Filed:
January 12, 2004
Publication date:
July 22, 2004
Applicant:
PSIA Corporation
Inventors:
Joonhyung Kwon, Young Seok Kim, Sang-il Park
Abstract: A scanning probe microscope uses two different scanners (also called “scanning stages”) that are completely detached each from the other, and are physically separated by a stationary frame. One scanner (called “x-y scanner”) scans a sample in a plane (also called “x-y plane”), while the other scanner (called “z scanner”) scans a probe tip (which is supported at a free end of a cantilever) in a direction (also called “z direction”) perpendicular to the plane. Detachment of the two scanners from one another eliminates crosstalk.
Type:
Grant
Filed:
February 15, 2002
Date of Patent:
January 13, 2004
Assignee:
PSIA Corporation
Inventors:
Jaewan Hong, Joonhyung Kwon, Sang-il Park
Abstract: A microscope uses electrostatic force modulation microscopy to measure mechanical and electrical characteristics of a sample. A tip contacts the sample while a voltage (which may have dc and ac components) is applied between the tip and sample. The tip oscillates even though the tip is contacting the sample due to strong electrostatic force interaction between the tip and sample. Different characteristics of the sample such as hardness, surface potential, capacitance, surface charge, and so forth, are measured by manipulating the oscillation of the tip relative to the sample and monitoring the position of the tip.
Type:
Grant
Filed:
February 17, 1998
Date of Patent:
February 13, 2001
Assignee:
PSIA Corporation
Inventors:
Jaewan Hong, Sang-il Park, Zheong-Gu Khim