Patents Assigned to Qorvo US, Inc.
  • Patent number: 11978659
    Abstract: The present disclosure relates to a radio frequency (RF) device including a device substrate, a thinned device die with a device region over the device substrate, a first mold compound, and a second mold compound. The device region includes an isolation portion, a back-end-of-line (BEOL) portion, and a front-end-of-line (FEOL) portion with a contact layer and an active section. The contact layer resides over the BEOL portion, the active section resides over the contact layer, and the isolation portion resides over the contact layer to encapsulate the active section. The first mold compound resides over the device substrate, surrounds the thinned device die, and extends vertically beyond the thinned device die to define an opening over the thinned device die and within the first mold compound. The second mold compound fills the opening and directly connects the isolation portion of the thinned device die.
    Type: Grant
    Filed: April 22, 2019
    Date of Patent: May 7, 2024
    Assignee: Qorvo US, Inc.
    Inventors: Julio C. Costa, Michael Carroll
  • Patent number: 11973469
    Abstract: Envelope tracking power supply circuitry includes a look up table (LUT) configured to provide a target supply voltage based on a power envelope measurement. The target supply voltage is dynamically adjusted based on a delay between the power envelope of an RF signal and a provided envelope tracking supply voltage. The envelope tracking supply voltage is generated from the adjusted target supply voltage in order to synchronize the envelope tracking supply voltage with the power envelope of the RF signal.
    Type: Grant
    Filed: June 18, 2021
    Date of Patent: April 30, 2024
    Assignee: Qorvo US, Inc.
    Inventors: James M. Retz, Nadim Khlat
  • Patent number: 11964276
    Abstract: Methods of fabricating a bulk acoustic wave resonator structure for a fluidic device. The methods can include a first step of disposing a first conductive material over a portion of a first surface of a substrate to form at least a portion of a first electrode, the substrate having a second surface opposite the first surface. Then, a piezoelectric material may be disposed over the first electrode. Next, a second conductive material can be disposed over the piezoelectric material to form at least a portion of a second electrode. The second conductive material extends substantially parallel to the first surface of the substrate and the second conductive material at least partially extends over the first conductive material. The overlapping region of the first conductive material, the piezoelectric material, and the second conductive material form a bulk acoustic wave resonator, the bulk acoustic wave resonator having a first side and an opposing second side.
    Type: Grant
    Filed: May 19, 2022
    Date of Patent: April 23, 2024
    Assignee: Qorvo US, Inc.
    Inventors: Rio Rivas, Kevin McCarron, Matthew Wasilik, David Doerr
  • Patent number: 11964866
    Abstract: Methods of forming a microelectromechanical device are disclosed. In some embodiments, a first layer is deposited on a backplane having at least two electrodes. One or more electrical contacts over the first layer are formed. Forming the one or more electrical contacts includes: depositing a first ruthenium layer over the first layer, depositing a titanium nitride layer over the first ruthenium layer, depositing a second ruthenium layer over the titanium nitride layer, etching the second ruthenium layer with a first etchant, etching the titanium nitride layer with a second etchant different than the first etchant; and etching the first ruthenium layer with the first etchant. Additionally, a beam is formed above one or more electrical contacts, the beam being spaced from the one or more electrical contacts and a top electrode is formed above the beam. A seal layer above the beam to enclose the beam in a cavity.
    Type: Grant
    Filed: April 13, 2023
    Date of Patent: April 23, 2024
    Assignee: Qorvo US, Inc.
    Inventors: Mickael Renault, Jacques Marcel Muyango, Shibajyoti Ghosh Dastider
  • Patent number: 11959885
    Abstract: This disclosure describes methods and devices that assist in forming biosensors. Specifically, features that align solutions containing molecules to be immobilized on biosensors. A retaining structure may be disposed at least partially around a target surface of a substrate. A resonating structure may be disposed on the target surface. A droplet of functionalized material may be disposed on the resonating structure and the target surface, which may be auto-aligned and retained by the retaining structure on the target surface to consistently cover the resonating structure.
    Type: Grant
    Filed: August 20, 2021
    Date of Patent: April 16, 2024
    Assignee: Qorvo US, Inc.
    Inventor: James Russell Webster
  • Patent number: 11961781
    Abstract: The present disclosure relates to a radio frequency device that includes a mold device die and a multilayer redistribution structure underneath the mold device die. The mold device die includes a device region with a back-end-of-line (BEOL) portion and a front-end-of-line (FEOL) portion over the BEOL portion, and a first mold compound with nanotube particles. The FEOL portion includes isolation sections and an active layer surrounded by the isolation sections. The nanotube particles are dispersed throughout a bottom portion of the first mold compound, and have a higher thermal conductivity than the first mold compound alone. The bottom portion of the first mold compound resides over the active layer and top surfaces of the isolation sections. The multilayer redistribution structure includes a number of bump structures, which are at a bottom of the multilayer redistribution structure and electrically coupled to the FEOL portion of the mold device die.
    Type: Grant
    Filed: April 9, 2020
    Date of Patent: April 16, 2024
    Assignee: Qorvo US, Inc.
    Inventors: Julio C. Costa, Todd Gillenwater
  • Patent number: 11962338
    Abstract: Equalization filter calibration in a wideband transmission circuit is provided. The transceiver circuit generates a radio frequency (RF) signal(s) from a time-variant modulation vector and a power amplifier circuit(s) amplifies the RF signal(s) based on a modulated voltage. The transceiver circuit is configured to apply an equalization filter to the time-variant modulation vector to thereby compensate for a voltage distortion filter created at the output stage of the power amplifier circuit(s). In embodiments disclosed herein, a calibration circuit can be configured to calibrate the equalization filter across multiple frequencies within a modulation bandwidth of the power amplifier circuit to generate a gain offset lookup table (LUT) and a delay LUT. As a result, the equalization filter can be dynamically adapted to reduce undesired instantaneous excessive compression and/or spectrum regrowth resulting from the voltage distortion filter across the modulation bandwidth of the power amplifier circuit.
    Type: Grant
    Filed: May 5, 2022
    Date of Patent: April 16, 2024
    Assignee: Qorvo US, Inc.
    Inventors: Nadim Khlat, James M. Retz
  • Patent number: 11961813
    Abstract: The present disclosure relates to a radio frequency (RF) device that includes a mold device die and a multilayer redistribution structure underneath the mold device die. The mold device die includes a device region with a back-end-of-line (BEOL) portion and a front-end-of-line (FEOL) portion over the BEOL portion, and a first mold compound. The FEOL portion includes an active layer formed from a strained silicon epitaxial layer, in which a lattice constant is greater than 5.461 at a temperature of 300K. The first mold compound resides over the active layer. Herein, silicon crystal does not exist between the first mold compound and the active layer. The multilayer redistribution structure includes a number of bump structures, which are at a bottom of the multilayer redistribution structure and electrically coupled to the FEOL portion of the mold device die.
    Type: Grant
    Filed: January 11, 2022
    Date of Patent: April 16, 2024
    Assignee: Qorvo US, Inc.
    Inventors: Julio C. Costa, Michael Carroll
  • Patent number: 11955687
    Abstract: Power-combining devices, and more particularly spatial power-combining and related structural arrangements are disclosed. Such structural arrangements involve mechanical connections between center waveguide sections and input and/or output coaxial waveguide sections that provide scalable structures for different operating frequency bands, improved mechanical connections, and/or improved assembly. Exemplary structural arrangements include structures that extend through center waveguide sections and into input and/or output coaxial waveguide sections, integrated mechanical structures within the center waveguide section, compression fit arrangements, dielectric inserts arranged within channels of coaxial waveguide sections, and/or various combinations thereof.
    Type: Grant
    Filed: January 10, 2022
    Date of Patent: April 9, 2024
    Assignee: Qorvo US, Inc.
    Inventors: Dylan Murdock, Gregory Valenti, Eric Jackson
  • Patent number: 11956005
    Abstract: An apparatus supporting multi-radio coexistence is provided. The apparatus is configured to support coexistence between multiple transceiver circuits configured to communicate radio frequency (RF) signals in a shared RF medium. In examples discussed herein, one transceiver circuit asserts a medium access request via a standard-defined coexistence interface for communicating an RF signal in the shared RF medium. The transceiver circuit may be configured to assert or de-assert the medium access request in response to a variety of trigger events. Depending on whether the medium access request is granted, the transceiver circuit may start communicating the RF signal in the shared RF medium in different modes. As such, it may be possible to reduce medium access delay for the transceiver circuit requesting to access the shared RF medium, while protecting the transceiver circuit currently occupying the shared RF medium from undue interruption and interference.
    Type: Grant
    Filed: April 11, 2022
    Date of Patent: April 9, 2024
    Assignee: Qorvo US, Inc.
    Inventors: Mayur Sarode, Marcel Vrijkorte
  • Patent number: 11955348
    Abstract: The present disclosure relates to a radio frequency (RF) device that includes a mold device die and a multilayer redistribution structure underneath the mold device die. The mold device die includes a device region with a back-end-of-line (BEOL) portion and a front-end-of-line (FEOL) portion over the BEOL portion, a thermally conductive film, and a first mold compound. The FEOL portion includes isolation sections and an active layer surrounded by the isolation sections. The thermally conductive film, which has a thermal conductivity greater than 10 W/m·K and an electrical resistivity greater than 1E5 Ohm-cm, resides between the active layer and the first mold compound. Herein, silicon crystal does not exist between the first mold compound and the active layer. The multilayer redistribution structure includes a number of bump structures, which are at a bottom of the multilayer redistribution structure and electrically coupled to the FEOL portion of the mold device die.
    Type: Grant
    Filed: November 8, 2019
    Date of Patent: April 9, 2024
    Assignee: Qorvo US, Inc.
    Inventors: Julio C. Costa, Michael Carroll, Philip W. Mason, Merrill Albert Hatcher, Jr.
  • Patent number: 11948838
    Abstract: The present disclosure relates to a semiconductor chip that includes a substrate, a metal layer, and a number of component portions. Herein, the substrate has a substrate base and a number of protrusions protruding from a bottom surface of the substrate base. The substrate base and the protrusions are formed of a same material. Each of the protrusions has a same height. At least one via hole extends vertically through one protrusion and the substrate base. The metal layer selectively covers exposed surfaces at a backside of the substrate and fully covers inner surfaces of the at least one via hole. The component portions reside over a top surface of the substrate base, such that a certain one of the component portions is electrically coupled to a portion of the metal layer at the top of the at least one via hole.
    Type: Grant
    Filed: February 14, 2023
    Date of Patent: April 2, 2024
    Assignee: Qorvo US, Inc.
    Inventor: Deep C. Dumka
  • Patent number: 11948893
    Abstract: The disclosure is directed to an electronic device with a lid to manage radiation feedback. The electronic device includes a lid having at least one sidewall and a top wall, as well as a semiconductor positioned within a cavity of the lid. In certain embodiments, the lid includes at least one dielectric material and at least one internal conductive layer at least partially embedded within the at least one dielectric material. In certain embodiments, the lid includes dielectric material, as well as an internal wall extending from the top wall and positioned between an input port and an output port of the semiconductor. Such configurations may suppress any undesirable feedback through the lid between the input port and the output port of the semiconductor.
    Type: Grant
    Filed: December 21, 2021
    Date of Patent: April 2, 2024
    Assignee: Qorvo US, Inc.
    Inventors: Zhunming Du, Christopher Sanabria, Timothy M. Gittemeier, Terry Hon, Anthony Chiu, Tariq Lodhi
  • Patent number: 11948830
    Abstract: The present disclosure relates to a radio frequency (RF) device including a device substrate, a thinned device die with a device region over the device substrate, a first mold compound, and a second mold compound. The device region includes an isolation portion, a back-end-of-line (BEOL) portion, and a front-end-of-line (FEOL) portion with a contact layer and an active section. The contact layer resides over the BEOL portion, the active section resides over the contact layer, and the isolation portion resides over the contact layer to encapsulate the active section. The first mold compound resides over the device substrate, surrounds the thinned device die, and extends vertically beyond the thinned device die to define an opening over the thinned device die and within the first mold compound. The second mold compound fills the opening and directly connects the isolation portion of the thinned device die.
    Type: Grant
    Filed: April 22, 2019
    Date of Patent: April 2, 2024
    Assignee: Qorvo US, Inc.
    Inventors: Julio C. Costa, Michael Carroll
  • Patent number: 11942389
    Abstract: The present disclosure relates to a thermally enhanced package, which includes a carrier, a thinned die over the carrier, a mold compound, and a heat extractor. The thinned die includes a device layer over the carrier and a dielectric layer over the device layer. The mold compound resides over the carrier, surrounds the thinned die, and extends beyond a top surface of the thinned die to define an opening within the mold compound and over the thinned die. The top surface of the thinned die is at a bottom of the opening. At least a portion of the heat extractor is inserted into the opening and in thermal contact with the thinned die. Herein the heat extractor is formed of a metal or an alloy.
    Type: Grant
    Filed: May 26, 2021
    Date of Patent: March 26, 2024
    Assignee: Qorvo US, Inc.
    Inventors: Julio C. Costa, George Maxim
  • Patent number: 11942391
    Abstract: The present disclosure relates to a system in package having a chiplet with a first substrate and a first die deposed over the first substrate, a second die, a second substrate that the chiplet and the second die are deposed over, and a heatsink spreader deposed over the chiplet and the second die. Herein, the first substrate includes layered-cake shaped heatsink stanchions that are coupled to the first die, and the second substrate includes layered-cake shaped heatsink stanchions that are coupled to the chiplet and the second die. As such, heat generated by the first die can be dissipated by the heatsink stanchions within the first and second substrates, and heat generated by the second die can be dissipated by the heatsink stanchions within the second substrate. Furthermore, the heat generated by the first die and the second die can be dissipated by the heatsink spreader above them.
    Type: Grant
    Filed: November 30, 2021
    Date of Patent: March 26, 2024
    Assignee: Qorvo US, Inc.
    Inventors: Kelly M. Lear, Jeffrey Miller, Mihir Roy, Christine Blair
  • Patent number: 11942899
    Abstract: Envelope tracking (ET) voltage correction in a transmission circuit is provided. The transmission circuit includes a transceiver circuit and a power amplifier circuit(s). The transceiver circuit generates a radio frequency (RF) signal(s) from a time-variant modulation vector and the power amplifier circuit(s) amplifies the RF signal(s) based on a modulated voltage and provides the amplified RF signal(s) to a coupled RF front-end circuit. Herein, the transceiver circuit is configured to apply a complex filter(s) to the time-variant modulation vector and/or the RF signal(s) to compensate for a voltage distortion filter created across a modulation bandwidth of the RF signal(s) by coupling the power amplifier circuit with the RF front-end circuit.
    Type: Grant
    Filed: March 22, 2022
    Date of Patent: March 26, 2024
    Assignee: Qorvo US, Inc.
    Inventors: Nadim Khlat, James M. Retz
  • Patent number: 11943019
    Abstract: Systems and methods for low-power multi-antenna synchronization are disclosed. In one aspect, a computing device, such as an Internet of Things (IoT) computing device, may include a transceiver operating using BLUETOOTH LOW ENERGY (BLE) with multiple antennas. In an exemplary aspect, each of a plurality of antennas is coupled to a respective edge detection circuit. When an incoming signal is detected by one of the edge detection circuits, circuitry associated with others of the multiple antennas may be placed in a low-power mode while circuitry associated with the detecting edge detection circuit attempts to synchronize with the incoming signal to see if the incoming signal is a signal of interest.
    Type: Grant
    Filed: December 3, 2021
    Date of Patent: March 26, 2024
    Assignee: Qorvo US, Inc.
    Inventor: Andrew Fort
  • Patent number: 11936341
    Abstract: Envelope tracking power supply circuitry includes a look up table (LUT) configured to provide a target supply voltage based on a power envelope measurement. The target supply voltage is dynamically adjusted based on a delay between the power envelope of an RF signal and a provided envelope tracking supply voltage. The envelope tracking supply voltage is generated from the adjusted target supply voltage in order to synchronize the envelope tracking supply voltage with the power envelope of the RF signal.
    Type: Grant
    Filed: June 18, 2021
    Date of Patent: March 19, 2024
    Assignee: Qorvo US, Inc.
    Inventor: Nadim Khlat
  • Patent number: 11929300
    Abstract: An integrated circuit (IC) package with an embedded heat spreader in a redistribution layer (RDL) is provided. IC packaging facilitates a high density package for ICs, including monolithic microwave integrated circuits (MMICs). However, IC packaging may result in reduced heat removal from an IC, decreasing radio frequency (RF) circuit performance. In an exemplary aspect, an IC package is provided which incorporates an embedded heat spreader within a dielectric layer of an RDL coupled to an IC die. The embedded heat spreader provides efficient heat transfer, robust RF performance, and operation through millimeter wave (mmW) frequencies, all in a miniature low-cost, low-profile surface mountable (SM) package.
    Type: Grant
    Filed: February 23, 2023
    Date of Patent: March 12, 2024
    Assignee: Qorvo US, Inc.
    Inventors: Kevin J. Anderson, Andrew Arthur Ketterson, Tarak A. Railkar, Deep C. Dumka, Christo Bojkov