Patents Assigned to RAONTEC Inc.
  • WAFER TRANSFER ROBOT APPARATUS BASED ON DIRECT DRIVE MOTOR
    Publication number: 20230133347
    Abstract: A wafer transfer robot apparatus based on a direct drive motor, includes: a hand module including a hand loading a wafer from one surface and a hand arm coupled to the hand to transfer the wafer; an R-axis module; a connecting enclosing module having one end coupled to the R-axis module; and a T-axis module rotatably coupled to the connecting enclosure module.
    Type: Application
    Filed: September 6, 2022
    Publication date: May 4, 2023
    Applicant: RAONTEC Inc.
    Inventors: Jin Ho OH, Sang Chan CHOI, Zheng Yuan LI