Patents Assigned to Ritek Display Technology Corporation
  • Patent number: 6613156
    Abstract: A photoresist stripping apparatus and a corresponding method for removing photoresist layers after a patterned polyimide layer is developed. The photoresist-stripping apparatus includes a transporting unit, a stripping unit, a washing unit, a drying unit and a control unit. The transporting unit connects the stripping unit, the washing unit and the drying unit. The control unit is responsible for controlling the transport sequence and timing of the transporting unit. The method of stripping the photoresist layer off the OLED panel includes providing a stripping solution to the stripping unit to remove photoresist layers. The OLED panel is jet-cleaned with a washing solution in the washing unit so that any residual stripping agent is removed. Finally, the surface of the OLED panel is blown dry.
    Type: Grant
    Filed: January 23, 2001
    Date of Patent: September 2, 2003
    Assignee: Ritek Display Technology Corporation
    Inventors: Yih Chang, Tien-Rong Lu