Abstract: A method for fabricating a locally reinforced metallic microfeature on a substrate provided preferably with an electrical contacting or a driving circuit, and on an organic, patterned sacrificial layer, which is removed after the metallic microfeature is applied, is described. In fabricating the local reinforcement of the microfeature, at least one further organic layer, formed as a mask, is deposited, which is likewise removed following pattern delineation of the metallic layer.
Type:
Grant
Filed:
November 24, 1999
Date of Patent:
March 26, 2002
Assignee:
Robert Bosch GmbHl
Inventors:
Roland Mueller-Fiedler, Juergen Graf, Stefan Kessel, Joerg Rehder