Abstract: A differential pressure gage apparatus is disclosed which utilizes two pistons movable within three bores to produce accurate differential pressures. An inner piston carried by an outer piston has sufficient length to extend into all bores at once.
Abstract: An apparatus for transferring wafers between a process carrier and a furnace carrier. The apparatus lifts a plurality of wafers from one carrier and deposits them into another carrier without damage to the wafers or touching any more than the edge surfaces and adjacent areas of the wafers.
Type:
Grant
Filed:
May 24, 1983
Date of Patent:
August 21, 1984
Assignee:
Ruska Instrument Corporation
Inventors:
Lorenzo D. Geren, deceased, Raymond D. Worden