Abstract: A pressure sensor has a multiplicity of piezoelectric converter elements which are arranged such that they are essentially parallel to a force-applying or pressure-applying direction. The converter elements can be arranged at a distance from one another by an insulating material and/or are at least partially embedded in the material. A support material having greater mechanical rigidity than the converter elements, in particular in the force-applying or pressure-applying direction, is assigned to at least a number of piezoelectric converter elements, or the piezoelectric converter element is applied, in the form of a layer, to a supporting body made from this support material and is electrically contact-connected, for example, by a bottom electrode, which is arranged between the converter element layer and the supporting body, and a cover electrode which is applied to an outer side of the converter element layer.
Type:
Grant
Filed:
June 20, 2005
Date of Patent:
October 30, 2012
Assignees:
S.W.A.C. Schmitt-Walter Automation Consult GmbH, Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
Inventors:
Stefan Schmitt-Walter, Lutz Seffner, Thomas Roedig, Sylvia Gebhardt, Bent Brueckner, Andreas Schoenecker