Patents Assigned to Sanyo Electric Industries, Ltd.
  • Semiconductor sensor
    Patent number: 7373835
    Abstract: A semiconductor sensor for improving manufacturing productivity. Opposing electrodes, or a diaphragm electrode and a fixed electrode, form an electrostatic capacity sensing semiconductor microphone on a microphone chip. A through electrode is formed on the microphone chip by a conductor extending between the upper and lower surfaces of the semiconductor substrate. The through electrode directly and electrically connects a MEMS configuration formed by the diaphragm electrode to the wiring of a printed wiring board without using wire bonding.
    Type: Grant
    Filed: December 15, 2005
    Date of Patent: May 20, 2008
    Assignee: Sanyo Electric Industries, Ltd.
    Inventor: Naoteru Matsubara