Abstract: An arrangement for coupling microwave energy with a reaction chamber, including electrically stable tuning and being, within limits, tolerant against changes in critical dimensions and power fluctuations. A coaxial line between a hollow waveguide and the reaction chamber is of such a structure that it forms, at least together with the reaction chamber, a loss resonator for the microwave frequency employed. The coaxial line can comprise an absorber or, alternatively, can be made of a poorly conductive material. There is also the possibility of downgrading the quality of the resonator by leaving an annular gap between a metal plate and an outer conductor section.
Type:
Grant
Filed:
July 10, 1992
Date of Patent:
April 5, 1994
Assignee:
Schott Glasewerke
Inventors:
Harald Krummel, Ewald Morsen, Helge Vogt, Gunter Weidmann