Abstract: Disclosed herein are compounds useful for the deposition of high purity tin oxide. Also disclose are methods for the deposition of tin oxide films using such compounds. Such films demonstrate high conformality, high etch selectivity and are optically transparent. Such compounds are those of the Formula as follows Rx—Sn-A4-x wherein: A is selected from the group consisting of (YaR?z) and a 3- to 7-membered N-containing heterocyclic group; each R group is independently selected from the group consisting of an alkyl or aryl group having from 1 to 10 carbon atoms; each R? group is independently selected from the group consisting of an alkyl, acyl or aryl group having from 1 to 10 carbon atoms; x is an integer from 0 to 4; a is an integer from 0 to 1; Y is selected from the group consisting of N, O, S, and P; and z is 1 when Y is O, S or when Y is absent and z is 2 when Y is N or P.

Abstract: The invention relates to the use of thionyl chloride and related materials for dry etching of internal surfaces of metalorganic vapor phase epitaxy (MOVPE) reactors to remove deposits. The method is also useful for the dry etching of process substrates within such reactors for cleaning and processing of those substrates. The invention may be particularly adaptable to chemical vapor deposition reactors used in the manufacture of high brightness LED's based on III-V semiconductors such as GaN and related materials. Features of the process include thermal, UV, and plasma activated dry cleaning, and the use of etchant gases such as COCl2, COBr2, COl2, SOl2, SOCl2, SOBr2, SO2Cl2, SO2Br2, NOCI, NOBr, NOl, S2Cl2, S2Br2, SCI2, SBr2, SOClBr, SOClF and SOFBr, either formed from neat materials or combinations of constituent gases such as CO, SO, SO2 or NO with halogens, to achieve the desired effect.

Abstract: An improved dropper cap, for use in controlled dispensing of liquid from a container, comprises an antechamber, a baffle and an elongated nozzle. The nozzle may comprise a flared spout to ensure clean separation of the liquid from the dropper cap, reducing dripping and smearing of the liquid on the dropper cap, as well as precise dispensing of the liquid. The baffle physically prevents splashing of the liquid from the container, and includes openings to control the flow of liquid into the nozzle. The baffle and antechamber cooperate to draw back undispensed liquid from the nozzle and prevent spurting of the liquid from the container between uses. Further, the dropper cap is threaded to allow easy attachment and removal from the container.