Patents Assigned to Semiconductor Leading Edge Technolgies, Inc.
  • Method for transporting boards, load port apparatus, and board transport system
    Patent number: 6808352
    Abstract: A substrate container having substrates stored therein and sealed with a door is placed onto a load port apparatus provided on a substrate processing system, and a door of the load port apparatus is docked with the door of the substrate container. An inside of the substrate container is pressurized before opening of the door of the substrate container before the door of the substrate container is opened and the substrates stored in the substrate container is transported to the substrate processing system.
    Type: Grant
    Filed: August 16, 2002
    Date of Patent: October 26, 2004
    Assignee: Semiconductor Leading Edge Technolgies, Inc.
    Inventor: Hisaharu Seita