Abstract: Provided is an application method of a Micro Electro Mechanical Systems (MEMS) inertial sensor and an electronic device. An application method of an accelerometer includes: based on an influence of a strain, generated under the action of an external force, of the accelerometer on a detection signal of the accelerometer, adopting the detection signal to reflect the external force. An application method of a gyroscope includes: based on an influence of a strain, generated under the action of an external force, of the gyroscope on a detection signal of the gyroscope, adopting the detection signal to reflect the external force. Further provided is an electronic device adopting the foregoing methods.

Abstract: A three-axis microelectromechanical system (MEMS) gyroscope includes four proof masses, where the proof masses are connected by spring beams and/or rigid beams; a first proof mass is configured to move in an X-axis direction; a second proof mass is configured to rotate around an X-direction axis, a Y-direction axis, and a Z-direction axis, and when the first proof mass moves in the X-axis direction, the second proof mass is driven to rotate around the Z-direction axis; a third proof mass is configured to move in the X-axis direction and a Y-axis direction, and when the first proof mass moves in the X-axis direction, the third proof mass is driven to move in the Y-axis direction; a fourth proof mass is configured to move in the X-axis direction, and when the third proof mass moves in the X-axis direction, the fourth proof mass is driven to move in the X-axis direction.

Abstract: A headphone and an electronic device are provided. The headphone includes a gyroscope, which senses a bone conduction vibration and provides a quadrature error signal for reflecting the bone conduction vibration. Specifically, the headphone includes a transmission assembly that acts directly or indirectly on the gyroscope or an inertial measurement unit (IMU) including the gyroscope. The transmission assembly transmits the bone conduction vibration to the gyroscope to make the gyroscope strain, thereby causing the quadrature error signal of the gyroscope to change to detect the bone conduction vibration with sensitivity.

Abstract: A headphone and an electronic device are provided. The headphone includes a gyroscope, which senses a bone conduction vibration and provides a quadrature error signal for reflecting the bone conduction vibration. Specifically, the headphone includes a transmission assembly that acts directly or indirectly on the gyroscope or an inertial measurement unit (IMU) including the gyroscope. The transmission assembly transmits the bone conduction vibration to the gyroscope to make the gyroscope strain, thereby causing the quadrature error signal of the gyroscope to change to detect the bone conduction vibration with sensitivity.

Abstract: Provided is an application method of a Micro Electro Mechanical Systems (MEMS) inertial sensor and an electronic device. An application method of an accelerometer includes: based on an influence of a strain, generated under the action of an external force, of the accelerometer on a detection signal of the accelerometer, adopting the detection signal to reflect the external force. An application method of a gyroscope includes: based on an influence of a strain, generated under the action of an external force, of the gyroscope on a detection signal of the gyroscope, adopting the detection signal to reflect the external force. Further provided is an electronic device adopting the foregoing methods.

Abstract: A three-axis microelectromechanical system (MEMS) gyroscope includes four proof masses, where the proof masses are connected by spring beams and/or rigid beams; a first proof mass is configured to move in an X-axis direction; a second proof mass is configured to rotate around an X-direction axis, a Y-direction axis, and a Z-direction axis, and when the first proof mass moves in the X-axis direction, the second proof mass is driven to rotate around the Z-direction axis; a third proof mass is configured to move in the X-axis direction and a Y-axis direction, and when the first proof mass moves in the X-axis direction, the third proof mass is driven to move in the Y-axis direction; a fourth proof mass is configured to move in the X-axis direction, and when the third proof mass moves in the X-axis direction, the fourth proof mass is driven to move in the X-axis direction.

Abstract: A MEMS accelerometer, including: a substrate, a movable component and a fixed electrode group, wherein a surface of the substrate has an anchoring region; the movable component is connected to the anchoring region through a supporting beam and suspended above the substrate, and the movable component includes a first proof mass and a second proof mass; the first proof mass has a first hollowed-out region in the middle, the first hollowed-out region is I-shaped, and the second proof mass is located in the first hollowed-out region; and the fixed electrode group includes a first electrode group, which is fixed on the surface of the substrate, located between the substrate and the movable component, and forms a Z-axis detection capacitor bank with the first proof mass and the second proof mass.

Abstract: A three-axis micro electro mechanical system (MEMS) gyroscope includes a central anchor, a first subsidiary proof mass, a first decoupling structure, a second subsidiary proof mass and a third subsidiary proof mass arranged in order from the inside out. When the first subsidiary proof mass resonates in a driving mode around a third direction, the first subsidiary proof mass approximately moves along the first direction. When the first subsidiary proof mass is subjected to an angular velocity around a second direction, a Coriolis force is generated along the third direction, and the first subsidiary proof mass produces a displacement around the first direction under the effect of the Coriolis force. The axis of the first decoupling structure is also in the first direction.