Abstract: A capacitive gas sensor in which a second electrode layer made of a nano-carbon material entangled to be three-dimensionally reticulated and a gas-sensitive film are not separated from each other. A capacitive gas sensor includes a substrate; a first electrode layer formed on the substrate; a gas-sensitive film formed on the first electrode layer and having air permeability; and a second electrode layer formed on the gas-sensitive film to be opposed to the first electrode layer and made of a nano-carbon material entangled to be three-dimensionally reticulated. The capacitive gas sensor also includes a reinforcing resin layer having air permeability and disposed at least on the second electrode layer.
Type:
Grant
Filed:
September 8, 2017
Date of Patent:
March 29, 2022
Assignees:
HOKURIKU ELECTRIC INDUSTRY CO., LTD., SHINSHU UNIVERSTIY