Abstract: The present invention provides a mounter air controller capable of executing appropriate air control associated with replacement of a nozzle without stopping operation of a mounter. This mounter air controller includes: a flow rate adjustment mechanism 4 mounted on a head module HM of the mounter; and control means 5 that controls this flow rate adjustment mechanism 4. The flow rate adjustment mechanism 4 is interposed between a positive-pressure region and a nozzle n and has a function capable of continuously changing a flow rate of passing air. The control means 5 is configured to bring the nozzle n to have a negative pressure and then control the flow rate in the flow rate adjustment mechanism 4 on the basis of an applied voltage or an applied current, which is determined in advance, so as to supply the air to the nozzle n.

Abstract: A door opening/closing system includes: a base as part of a wall isolating a conveyance space from an external space; an opening portion provided in the base; a door configured to open/close the opening portion; a first seal member which seals a gap between the base and a container; a second seal member which seals a gap between the base and the door; a sealed space constituted by the base, the first and second seal members, a lid member, and the door when the container state of contact with the opening portion with the first seal member therebetween; a first gas injection unit which injects gas into the sealed space; and a second gas discharge unit which evacuates the sealed space. The door opening/closing system prevents entry of atmospheric air into a front-opening unified pod and an equipment front end module when placed in communication.

Abstract: A soft spherical object conveying apparatus according to the present invention comprising: a water tank into which at least one soft spherical object is introduced; a conveying rotary member that rotates in the water tank and has a peripheral part provided with a plurality of housing recesses housing each one of the soft spherical objects; a guide member disposed along part of the peripheral part of the conveying rotary member in the water tank; and a removing roller that rotates on an upstream side of the guide member in the water tank in a rotation direction of the conveying rotary member, such that a part of the removing roller opposed to the peripheral part of the conveying rotary member moves in a direction away from the guide member.

Abstract: A load port including: a base as part of a wall partitioning a transportation space from an external space; an opening provided to the base; a door configured to open and close the opening and securing a lid to, and releasing a lid from, a container containing contents; and a first seal member for sealing the space between the base and the container. At least some of the container-side end surface of the door is located nearer to the transportation space than the container-side end part of the first seal member. The load port can keep a surrounding space clean when a FOUP is connected to a casing.

Abstract: A transfer device includes a first parallel four-joint link mechanism in which base end portions of a pair of first links are rotatably connected to a first link base and distal end portions of the first links are rotatably connected to an intermediate link base, a second parallel four-joint link mechanism in which base end portions of a pair of second links are rotatably connected to the intermediate link base and distal end portions of the second links are rotatably connected to a second link base, and a belt transmission mechanism including a pair of first pulleys respectively connected to the first links, a second pulley connected to one of the second links, and a belt provided around the first pulleys and the second pulley. The belt transmission mechanism transmits a rotational driving force such that the first links and the second links rotate in opposite directions to each other.

Abstract: A damping device includes a forced phase shifter 3a to calculate a force phase shift to be added to the inverse transfer characteristic stored in the adaptive control algorithm; a fluctuation calculator 3b to calculate a fluctuation of the magnitude of a command vector having amplitude information and phase information when the forced phase shift is added; a memory 3c to preliminarily store a variation in the phase error of the vibration transfer characteristic corresponding to the fluctuation of the magnitude of the command vector; and a phase error estimator 3d to estimate the phase error of the vibration transfer characteristic based on the fluctuation of the magnitude of the command vector calculated by the fluctuation calculator 3b and the variation in the phase error of the vibration transfer characteristic corresponding to the fluctuation of the magnitude of the command vector stored in the memory 3c.

Abstract: A load port including: a base as part of a wall partitioning a transportation space from an external space; an opening provided to the base; a door configured to open and close the opening and securing a lid to, and releasing a lid from, a container containing contents; and a first seal member for sealing the space between the base and the container. At least some of the container-side end surface of the door is located nearer to the transportation space than the container-side end part of the first seal member. The load port can keep a surrounding space clean when a FOUP is connected to a casing.

Abstract: A substrate storage container management system includes a load port, configured to transfer a substrate into and out of one or more substrate storage containers, including an ID reader configured to read one or more entity IDs for the substrate storage containers, and one or more sensors configured to directly or indirectly detect one or more states of the substrate storage containers, an associator configured to associate the entity IDs read by the ID reader with one or more sensor values detected by the sensors; a database in which data associated by the associator is accumulated, and a data processor configured to analyze the data in the database and to output a state of a respective substrate storage container for each of the entity IDs.

Abstract: A shaft includes a main refrigerant passage capable of supplying a refrigerant in one direction on an axial center part and a test piece side sub-refrigerant passage having a starting end communicating with the vicinity of a downstream end in a refrigerant supply direction of the main refrigerant passage. The downstream end in the refrigerant supply direction of the main refrigerant passage is set at the position before an end of the shaft at the side to which a test piece is connected and a predetermined position on the downstream side in the refrigerant supply direction relative to a test piece side bearing. An ending end (discharge port) of the test piece side sub-refrigerant passage is set on the upstream side (counter test piece side) in the refrigerant supply direction relative to the test piece side bearing.

Abstract: There is provided an exhaust nozzle unit capable of discharging a gas atmosphere in a substrate storage container having a loading/unloading opening from the container to an outside of the container through a port formed on a bottom surface of the container. The exhausted nozzle includes a nozzle capable of switching the port from a closed state to an open state by pressing a valve of the port; and a housing configured to hold the nozzle so as to be movable up and down between a use posture in which the port is in the open state and a standby posture in which the port is in the closed state.

Abstract: Provided is a cargo carrying vehicle including; an elevating table 2 elevatable in the vertical direction; a plurality of rotating bodies 31 located on the elevating table 2 and configured to rotate so as to carry a cargo C in a conveyance direction X that is a direction toward a loading-unloading part of an aircraft; and a support 32 configured to support the plurality of rotating bodies 31, wherein the support 32 and the plurality of rotating bodies 31 constitute the conveying unit 3, and the conveying unit 3 is movable on the elevating table 2 in a position adjusting direction Y that is a direction intersecting the vertical direction and the conveyance direction.

Abstract: A non-contact power supply device is used in a processing apparatus including a moving unit movable inside a closed container. The device supplies electric power to the moving unit from outside the closed container. The power supply device includes a feed unit and a heat dissipater. The feed unit includes a feed line and a power supply transformer. The feed line has a feed region arranged inside the closed container along the moving direction of the moving unit. The transformer is arranged inside the closed container so as to be opposed to the feed region in a non-contact manner and is provided so as to move together with the moving unit. The heat dissipater includes a portion on one end side connected to the feed region so as to be capable of conducting heat thereto, and a portion on the other end side extending outside the closed container, so that heat generated in the feed region is partially dissipated outside the closed container.

Abstract: In an invention including: a piezoelectric element (13) which generates, as a displacement, a driving force necessary for an operation of a valve body (12) which is an operating body; a displacement enlarging mechanism (14) including at least a spring element so as to enlarge a displacement of the piezoelectric element (13) which acts on the valve body (12); and a driving device (15) which operates the valve body (12) by applying a voltage to the piezoelectric element (13) to extend the piezoelectric element (13), the driving device (15) includes a first filter processing unit (15x) having an inverse function characteristic of a mechanical resonance frequency when operating the displacement enlarging mechanism (14), and is configured to apply, a voltage which reduces the mechanical resonance, to the piezoelectric element (13) through this resonance suppression processing unit (15x).

Abstract: A load port provided adjacent to a wafer transport chamber for taking in and out a wafer W between the wafer transport chamber and a FOUP, includes a plate-shaped part that constitutes a part of a wall of the wafer transport chamber, and has an opening for opening the wafer transport chamber; a door part for opening and closing the opening; a mounting table that is configured to mount a wafer storage container so as to oppose a lid part for opening and closing an internal space to the door part, and to move to and from the plate-shaped part; and an elastic part that is provided on the mounting table side of the plate-shaped part along the peripheral edge of the opening, wherein the elastic part elastically contacts the periphery of the lid part in the wafer storage container by moving the mounting table toward the plate-shaped part.

Abstract: A germ-free glove box includes: a housing in which a germ-free space is formed, the housing including a connector to which a container housing an object is connected; and a glove provided at a front plate of the housing to allow an operating personnel to perform an operation in the germ-free space from the outside of the housing. In this germ-free glove box, the connector is provided on an upper plate of the housing. In the germ-free glove box outside spaces beside the box are effectively utilized, and a large working space is secured at around the bottom surface of a germ-free space.

Abstract: Reliability in the restriction of the movement of a container is improved. A content moving device 1 includes: a table portion 20 on which a container 50 is placed; and a restricting mechanism 30. A flange 55 of the container 50 is shaped to provide a recessed portion 56a. A restricting mechanism 30 includes: a collar portion 31; a first restricting portion 32 configured to be located in the recessed portion 56a; a second restricting portion 33a provided above the first restricting portion 32 and inward of the collar portion 31; and a second moving mechanism.

Abstract: A cell culture container characterized by being equipped with a container main body and a flat plate attached onto one surface of the container main body, wherein the container main body is equipped with an inflow port through which a liquid can flow into the container main body, a passage through which the liquid flowing into the container main body from the inflow port can pass, and an outflow port through which the liquid passing through the passage can flow out from the container main body, and wherein, on the bottom surface of the passage, multiple cell-seeding areas in which cells passing through the passage can be seeded are arranged side by side along the passage.

Abstract: A load port provided adjacent to a wafer transport chamber for taking in and out a wafer W between the wafer transport chamber and a FOUP, includes a plate-shaped part that constitutes a part of a wall of the wafer transport chamber, and has an opening for opening the wafer transport chamber; a door part for opening and closing the opening; a mounting table that is configured to mount a wafer storage container so as to oppose a lid part for opening and closing an internal space to the door part, and to move to and from the plate-shaped part; and an elastic part that is provided on the mounting table side of the plate-shaped part along the peripheral edge of the opening, wherein the elastic part elastically contacts the periphery of the lid part in the wafer storage container by moving the mounting table toward the plate-shaped part.

Abstract: There is provided a power transmission device to switch a coupled state and an uncoupled state between a first member and a second member which are arranged in a transmission path of a driving force to thereby control transmission of the driving force. The device includes a movable body having ferromagnetic property, a first magnetic path and a second magnetic path, and a permanent magnet. The device also includes a driving portion to excite the electromagnet in the forward direction and then increases an attraction force on a side on which a magnetic flux is increased or decreased.

Abstract: A linear actuator is provided that has a configuration capable of inhibiting contact between an inner core and a plate spring that is connected to the inner core and an outer core, and which is realized by a configuration that is easy to assemble. A stator is arranged in an opening section of a through-hole in the inner core, and has a spacer through which a shaft passes. An outer frame section of the plate spring is connected to the outer core, and a fixed section of the plate spring is connected to the inner core through the spacer in a state in which the shaft passes therethrough. The spacer includes a penetration section having an insertion hole which the shaft is inserted through, and restriction sections and which restrict a displacement of a predetermined amount or more of the plate spring to the inner core side.