Abstract: The present invention solves numerous problems in state-of-the-art industrial anti-corrosion protection by using a reactive silicon oxide precursor solution. Among the problems solved are those of decreased heat transfer over a protected surface, limited protection against high-temperature corrosive fluids and difficulties in protecting complex 3D geometries and surfaces with a high surface roughness. The present invention furthermore provides an easy way of making chemical surface functionalization using e.g. silane chemistry. The invention solves these problems by coating the surface of a ceramic or metallic part with a thin layer of a liquid solution of a reactive silicon oxide precursor (rSiO-p) such as Hydrogen Silsesquioxane (HSQ) in Methyl Isobytul Ketone (MIBK) or volatile methyl siloxane (VMS), heating the part to a curing temperature of the rSiO-p, and after a curing time the reactive silicon oxide precursor is transformed into a thin layer of essentially pin-hole free silicon oxide.