Abstract: A vacuum process apparatus for preventing corrosion of a vacuum gauge is disclosed. The apparatus includes a process chamber used to proceed a vacuum process reaction. A vacuum gauge is connected to the process chamber. A protective gas source without water vapor which supplies a protective gas without water vapor into the process chamber to break vacuum in the process chamber after the vacuum process reaction within the process chamber is over. An isolation device between the process chamber and the vacuum gauge is actuated to isolate the process chamber from the vacuum gauge in an atmospheric pressure state caused by the protective gas without water vapor to avoid a pressure differential between the process chamber and the vacuum gauge.

Abstract: An auto cycled pipeline system includes a plurality of main pipes, a plurality of cycle pipes, and a plurality of control values. The plurality of main pipes arranged in parallel and used to pump the fluid, and one side of each main pipe is connected to an inlet pipe, the other side of each main pipe is connected to an exit pipe. Each main pipe has a check value and a cycle pipe. One side of each cycle pipe is attached to a foregoing joint in front of the check value and the other side is attached to a rearward joint behind the check value of each main pipe. And each cycle pipe has a control value. The stagnant fluid in the stopped main pipe can be cycled by the cycle pipe of the pipeline system automatically, to prevent deterioration and to keep the purity of the fluid in the pipeline system.

Abstract: The present invention provides an injector robot for replacing a gas injector in a running furnace, which is still running and without any cooling and reheating action. According to the present invention, the injector robot is arranged and mounted upon a boat elevator, which is originally used to transport a boat with wafers into the furnace. The replacement of the gas injector could be executed precisely and safely by the assistant means and will not affect the predetermined procedure of the furnace.